Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections

doi:10.1002/admt.202300333

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	Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections
	P. Qiu, Y. Guo, L. Huang, J. Li, J. Huang, M. Wang, Z. Zhang and S. Xu
	2023
发表期刊	Advanced Materials Technologies
ISSN	2365709X
卷号	8 期号:15
摘要	Fabricating precision microgrooves with controllable cross-sections on difficult-to-machine materials is significantly valuable but still challenging. Herein, a patterned laser-induced microjet-assisted ablation method for cross-sectional profiles controllable laser micromachining is proposed. During the liquid-assisted laser ablation process, debris and bubbles that may disturb the laser energy deposition can be instantaneously expelled by a directional laser-induced microjet. The Gaussian laser spot is spatially modulated into specific geometric shapes, such as triangles, to tune locally deposited laser energy to carve microgrooves with designed cross-sections. To achieve customized microgrooves efficiently, a reliable geometrical model based on the ablation threshold theory is developed to guide the processing parameter selection, including the laser spot shape, polarization, pulse energy, and scanning strategies. The simulation and experimental results confirm that this method achieves the decoupled control of the groove depth and width in a single-path laser ablation process. Using this method, the design and manufacturing of microgrooves with controllable cross-sections on single crystalline silicon carbide are demonstrated. The patterned laser-induced microjet-assisted ablation method provides a new route for fabricating precision microgrooves with controllable cross-sections on difficult-to-machine materials. © 2023 Wiley-VCH GmbH.
DOI	10.1002/admt.202300333
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收录类别	sci ; ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67804
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	P. Qiu, Y. Guo, L. Huang, J. Li, J. Huang, M. Wang, Z. Zhang and S. Xu. Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections[J]. Advanced Materials Technologies,2023,8(15).
APA	P. Qiu, Y. Guo, L. Huang, J. Li, J. Huang, M. Wang, Z. Zhang and S. Xu.(2023).Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections.Advanced Materials Technologies,8(15).
MLA	P. Qiu, Y. Guo, L. Huang, J. Li, J. Huang, M. Wang, Z. Zhang and S. Xu."Patterned Laser Ablation of Microgrooves with Controllable Cross-Sections".Advanced Materials Technologies 8.15(2023).

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