中国科学院长春光学精密机械与物理研究所

QQ客服 官方微博 反馈留言

	Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space
	M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel
	2023
发表期刊	ACS Nano
ISSN	19360851
卷号	17期号:18页码:17761-17770
摘要	On-chip waveguide sensors are potential candidates for deep-space exploration because of their high integration and low power consumption. Since the fundamental absorption of most gas molecules exists in the mid-infrared (e.g., 3-12 μm), it is of great significance to fabricate wideband mid-infrared sensors with high external confinement factor (ECF). To overcome the limited transparency window and strong waveguide dispersion, a chalcogenide suspended nanorib waveguide sensor was proposed for ultra-wideband mid-infrared gas sensing, and three waveguide sensors (WG1-WG3) with optimized dimensions exhibit a wide waveband of 3.2-5.6 μm, 5.4-8.2 μm, and 8.1-11.5 μm with exceptionally high ECFs of 107-116%, 107-116%, and 116-128%, respectively. The waveguide sensors were fabricated by a two-step lift-off method without dry etching to reduce the process complexity. Experimental ECFs of 112%, 110%, and 110% were obtained at 3.291 μm, 4.319 μm, and 7.625 μm, respectively, through methane (CH4) and carbon dioxide (CO2) measurements. A limit of detection of 5.9 ppm was achieved for an averaging time of 64.2 s through the Allan deviation analysis of CH4 at 3.291 μm, leading to a comparable noise equivalent absorption sensitivity of 2.3 × 10-5 cm-1 Hz-1/2 as compared to the hollow-core fiber and on-chip gas sensors. © 2023 American Chemical Society.
DOI	10.1021/acsnano.3c02699
URL	查看原文
收录类别	sci ; ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67792
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel. Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space[J]. ACS Nano,2023,17(18):17761-17770.
APA	M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel.(2023).Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space.ACS Nano,17(18),17761-17770.
MLA	M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel."Ultra-Wideband Mid-Infrared Chalcogenide Suspended Nanorib Waveguide Gas Sensors with Exceptionally High External Confinement Factor beyond Free-Space".ACS Nano 17.18(2023):17761-17770.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Ultra-Wideband Mid-I（4572KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览 下载

个性服务

推荐该条目

保存到收藏夹

查看访问统计

导出为Endnote文件

谷歌学术

谷歌学术中相似的文章

[M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel]的文章

百度学术

百度学术中相似的文章

[M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel]的文章

必应学术

必应学术中相似的文章

[M. Pi, C. Zheng, H. Zhao, Z. Peng, G. Guan, J. Ji, Y. Huang, Y. Min, L. Liang, F. Song, X. Bai, Y. Zhang, Y. Wang and F. K. Tittel]的文章

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。