Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing

doi:10.3390/mi14061142

CIOMP OpenIR

	Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing
	X. Ma, J. Wang, B. Wang, X. Liu and Y. Chen
	2023
发表期刊	Micromachines
ISSN	2072666X
卷号	14 期号:6
摘要	Complex optical elements have the advantages of improving image quality and optical performance and expanding the field of view. Therefore, it is widely used in X-ray scientific devices, adaptive optical elements, high-energy laser systems, and other fields and is a hot research direction in precision optics. Especially for precision machining, there is a greater need for high-precision testing technology. However, how to measure complex surfaces efficiently and accurately is still an important research topic in optical metrology technology. In order to verify the ability of optical metrology for complex optical surfaces with wavefront sensing based on image information of the focal plane, some experiment platforms in different types of optical surfaces were set up. In order to validate the feasibility and validity of wavefront-sensing technology based on image information of focal planes, a large number of repetitive experiments were carried out. The measurement results with wavefront sensing based on image information of the focal plane were compared with the measurement results with the ZYGO interferometer. The experimental results demonstrate that good agreement is obtained among the error distribution, PV value, and RMS value of the ZYGO interferometer, which shows the feasibility and validity of wavefront sensing based on image information of focal plane technology in optical metrology for the complex optical surface. © 2023 by the authors.
DOI	10.3390/mi14061142
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收录类别	sci ; ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67762
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Ma, J. Wang, B. Wang, X. Liu and Y. Chen. Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing[J]. Micromachines,2023,14(6).
APA	X. Ma, J. Wang, B. Wang, X. Liu and Y. Chen.(2023).Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing.Micromachines,14(6).
MLA	X. Ma, J. Wang, B. Wang, X. Liu and Y. Chen."Research on Optical Metrology for Complex Optical Surfaces with Focal Plane Wavefront Sensing".Micromachines 14.6(2023).

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