Single Photon Emitters in Hexagonal Boron Nitride Fabricated by Focused Helium Ion Beam

doi:10.1002/adom.202302083

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	Single Photon Emitters in Hexagonal Boron Nitride Fabricated by Focused Helium Ion Beam
	G.-L. Liu; X.-Y. Wu; P.-T. Jing; Z. Cheng; D. Zhan; Y. Bao; J.-X. Yan; H. Xu; L.-G. Zhang; B.-H. Li; K.-W. Liu; L. Liu and D.-Z. Shen
	2023
ISSN	21951071
摘要	The 2D layered hexagonal boron nitride (hBN) material is a promising platform for making single photon emitters (SPEs). Integrate SPEs with photonic cavities or waveguides, requires the deterministic positioning of these emitters as accurately as possible. Among all of the alternative techniques, He+ focused ion beam (FIB) theoretically has sub-nanometer precision, but its practical positioning accuracy in processing SPEs is limited by the inevitable detrimental byproduct defects. So far, it remains challenging to achieve an accuracy below 100 nm for the positioning of SPEs in hBN. Here, we present a two-step method for creating SPEs at the predetermined positions in hBN that combines the He+ FIB irradiation and thermal annealing under an oxygen atmosphere. With this method, we have realized the positioning accuracy of less than 50 nm, which, to the best of our knowledge, stands as the highest among the currently available hBN SPEs preparation methods. Moreover, the SPE conversion yield was over 35% and the emission brightness of individual SPE achieved up to 3 × 105 counts/s at room temperature. These SPEs fabricated precisely with nanoscale accuracy in hBN are expected to be good candidates for making large-scale integrated SPEs in photonic circuits. © 2023 Wiley-VCH GmbH.
DOI	10.1002/adom.202302083
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收录类别	sci ; ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67690
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	G.-L. Liu,X.-Y. Wu,P.-T. Jing,et al. Single Photon Emitters in Hexagonal Boron Nitride Fabricated by Focused Helium Ion Beam[J],2023.
APA	G.-L. Liu.,X.-Y. Wu.,P.-T. Jing.,Z. Cheng.,D. Zhan.,...&L. Liu and D.-Z. Shen.(2023).Single Photon Emitters in Hexagonal Boron Nitride Fabricated by Focused Helium Ion Beam..
MLA	G.-L. Liu,et al."Single Photon Emitters in Hexagonal Boron Nitride Fabricated by Focused Helium Ion Beam".(2023).

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