Investigation of perfect narrow-band absorber in silicon nano hole array

doi:10.1364/OE.501458

CIOMP OpenIR

	Investigation of perfect narrow-band absorber in silicon nano hole array
	Q. Li; H. Tang; Y. Zhao; H. Liu; Z. Shen; T. Wang; H. Yang; X. Wang; Y. Gong and J. Gao
	2023
发表期刊	Optics Express
ISSN	10944087
卷号	31 期号:19 页码:31644-31653
摘要	In this paper, we proposed a triple layer structure consisting of the bottom silver layer, thin silicon oxide space layer, and ultrathin semiconductor silicon film with nano hole array achieving three absorption peaks with narrow band. The absorption spectrum can be easily controlled by adjusting the structural parameters including the radius and period of the nano hole array, and the maximal absorption can reach 99.0% and the narrowest full width of half maximum can reach about 6.5 nm in theory. We also clarified the physical mechanism of the proposed structure in details by finite-difference time-domain simulation, in which the three narrow band perfect adsorption peaks can be attributed to electric dipole resonance, magnetic dipole resonance and plasmonic resonance respectively. At the same time, we used a low-cost nanosphere lithography method to fabricate the proposed nano hole array in large area. In experiment, the absorption peak of the proposed triple layer structure can reach up to 98.3% and the narrowest full width of half maximum can reach up to about 10.1 nm. The highest quality factor Q can reach up to 98.4. This work can open a new avenue for high-quality factor narrow band perfect absorption using ultrathin semiconductor film and benefit for many fields such as infrared sensors, plasmonic filters, and hyperspectral imaging. © 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.
DOI	10.1364/OE.501458
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收录类别	sci ; ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67633
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Q. Li,H. Tang,Y. Zhao,et al. Investigation of perfect narrow-band absorber in silicon nano hole array[J]. Optics Express,2023,31(19):31644-31653.
APA	Q. Li.,H. Tang.,Y. Zhao.,H. Liu.,Z. Shen.,...&Y. Gong and J. Gao.(2023).Investigation of perfect narrow-band absorber in silicon nano hole array.Optics Express,31(19),31644-31653.
MLA	Q. Li,et al."Investigation of perfect narrow-band absorber in silicon nano hole array".Optics Express 31.19(2023):31644-31653.

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