Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films

doi:10.1109/TED.2023.3314400

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	Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films
	J. Jia; H. Zhu; W. Liu; B. Li; Z. Shi; Q. Cui and C. Xu
	2023
发表期刊	IEEE Transactions on Electron Devices
ISSN	00189383
卷号	70 期号:11 页码:5856-5862
摘要	Based on the experimental discovery about the negative temperature coefficient (NTC) of ZnO, we fabricated a low-temperature sensor with ZnO thin film. Oxygen plasma and annealing treatment were carried out to manipulate the related defects and explore the negative temperature response, while a series of microstructural and optical properties were also characterized and compared for the cases before and after treatment. It demonstrated that zinc interstitials (Zni) played an important role in NTC response process. Moreover, we simulated the application conditions of cell cryopreservation and conducted relevant tests in the common temperature range of -120 °C-0 °C. The ZnO NTC sensor was applied for actual real-time temperature monitoring in a commercial low-temperature system. The sensor presented a nice sensitivity of 3.51 ×104Ω·K-1 at 90 K, a good repeatability, recoverability, and a fast response speed. The results showed a great potential of ZnO NTC sensor for biomedical cryogenics applications. © 1963-2012 IEEE.
DOI	10.1109/TED.2023.3314400
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收录类别	sci ; ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67549
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J. Jia,H. Zhu,W. Liu,et al. Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films[J]. IEEE Transactions on Electron Devices,2023,70(11):5856-5862.
APA	J. Jia,H. Zhu,W. Liu,B. Li,Z. Shi,&Q. Cui and C. Xu.(2023).Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films.IEEE Transactions on Electron Devices,70(11),5856-5862.
MLA	J. Jia,et al."Temperature Sensors Based on Negative Temperature Coefficient of ZnO Thin Films".IEEE Transactions on Electron Devices 70.11(2023):5856-5862.

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