High repetition frequency 257 nm deep ultraviolet picosecond laser with 5.2 W output power

doi:10.37188/CO.2023-0026

CIOMP OpenIR

	High repetition frequency 257 nm deep ultraviolet picosecond laser with 5.2 W output power
	H.-R. Fan; X. Chen; L. Zheng; W.-X. Xie; X. Ji and Q. Zheng
	2023
Source Publication	Chinese Optics
ISSN	20971842
Volume	16 Issue:6 Pages:1318-1323
Abstract	To improve the detection efficiency of deep ultraviolet laser for semiconductor detection, it is necessary to develop 257 nm deep ultraviolet picosecond laser with high power and high repetition frequency. In this study, a 257 nm deep ultraviolet laser was experimentally investigated based on photonic fiber amplifier and extra-cavity frequency quadrupling. The seed source uses a fiber laser with a central wavelength of 1 030 nm and a pulse width of 50 ps, delivering a power output of 20 mW and a repetition frequency of 19.8 MHz. High power 1 030 nm fundamental frequency light was obtained through a two-stage ytterbium-doped double cladding (65 μm/275 μm) photonic crystal fiber rod amplification structure, and 257 nm deep ultraviolet laser was generated using double frequency crystal LBO and quadruple frequency crystal BBO. The seed source uses a two-stage photonic crystal fiber amplifier to get a 1030 nm laser with output power of 86 W. After the laser focusing system and frequency doubling, a second harmonic output power of 47.5 W at 515 nm and a fourth harmonic output power of 5.2 W at 257 nm were obtained.The fourth harmonic conversion efficiency was 6.05%. The experimental results show that this structure can obtain high power 257 nm deep ultraviolet laser output, providing a novel approach to improve the detection efficiency of the lasers for semiconductor detection. © 2023 Editorial Office of Chinese Optics. All rights reserved.
DOI	10.37188/CO.2023-0026
URL	查看原文
Indexed By	ei
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Document Type	期刊论文
Identifier	http://ir.ciomp.ac.cn/handle/181722/67450
Collection	中国科学院长春光学精密机械与物理研究所
Recommended Citation GB/T 7714	H.-R. Fan,X. Chen,L. Zheng,et al. High repetition frequency 257 nm deep ultraviolet picosecond laser with 5.2 W output power[J]. Chinese Optics,2023,16(6):1318-1323.
APA	H.-R. Fan,X. Chen,L. Zheng,W.-X. Xie,&X. Ji and Q. Zheng.(2023).High repetition frequency 257 nm deep ultraviolet picosecond laser with 5.2 W output power.Chinese Optics,16(6),1318-1323.
MLA	H.-R. Fan,et al."High repetition frequency 257 nm deep ultraviolet picosecond laser with 5.2 W output power".Chinese Optics 16.6(2023):1318-1323.

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中国科学院长春光学精密机械与物理研究所