Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors

doi:10.37188/CJL.20230221

CIOMP OpenIR

	Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors
	G. Chu, G. Yang, T. Liu, J. Li, W. Chang, X. Fan and C. Tong
	2023
Source Publication	Faguang Xuebao/Chinese Journal of Luminescence
ISSN	10007032
Volume	44 Issue:12 Pages:2250-2257
Abstract	In addition to the focusing and imaging functions，Metalens can also manipulate light field polarization，wavelength，and amplitude through kinds of meta-units. Due to the small size，light weight，low cost and easy inte⁃ gration，Metalens has become a research hotspot and important trend in optoelectronic integration area. In this pa⁃ per，finite-difference time-domain（FDTD）algorithm is used to design and optimize Metalens based on in⁃situ inte⁃ gration of InGaAs avalanche detectors，and the focusing efficiency and transmittance of the Metalens are calculated. The simulation results show that the Metalens converges incident light into the absorption layer of detector，the trans⁃ mittance reaches 82. 8%，and the focusing efficiency reaches 84. 89% when the target focal length is 150 μm and the Metalens radius is 50 μm. To further increase the transmittance，an anti-reflection（AR）layer is added. The results show that the maximum transmittance is 86. 6% and 87. 6% for 300 nm SiO2 and 250 nm SiN. Compared with the Metalens without AR layer，the max transmittance increased by 3. 8% and 4. 8%，respectively. Finally，it is estimat⁃ ed that the energy of the light field in the absorption region integrated with Metalens is 250. 96 times higher than that of the detector without Metalens，which can greatly improve the responsivity of detector. This paper proposes a mono⁃ lithic integrated method for avalanche detector with Metalens，which can concentrate the energy outside the detection area into absorption area，improves the quantum efficiency of detector without bandwidth reduction. This will provide a new sight for high responsivity and high bandwidth detectors. © 2023 Chines Academy of Sciences. All rights reserved.
DOI	10.37188/CJL.20230221
URL	查看原文
Indexed By	ei
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Document Type	期刊论文
Identifier	http://ir.ciomp.ac.cn/handle/181722/67409
Collection	中国科学院长春光学精密机械与物理研究所
Recommended Citation GB/T 7714	G. Chu, G. Yang, T. Liu, J. Li, W. Chang, X. Fan and C. Tong. Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors[J]. Faguang Xuebao/Chinese Journal of Luminescence,2023,44(12):2250-2257.
APA	G. Chu, G. Yang, T. Liu, J. Li, W. Chang, X. Fan and C. Tong.(2023).Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors.Faguang Xuebao/Chinese Journal of Luminescence,44(12),2250-2257.
MLA	G. Chu, G. Yang, T. Liu, J. Li, W. Chang, X. Fan and C. Tong."Design and Simulation of Metalens for Enhanced Responsivity of Avalanche Photodetectors".Faguang Xuebao/Chinese Journal of Luminescence 44.12(2023):2250-2257.

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中国科学院长春光学精密机械与物理研究所