Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| Accurately predicting the tool influence function to achieve high-precision magnetorheological finishing using robots | |
| R. Cheng, L. Li, D. Xue, X. Li, Y. Bai, X. Luo and X. Zhang | |
| 2023 | |
| 发表期刊 | Optics Express
 |
| ISSN | 10944087 |
| 卷号 | 31期号:21页码:34917-34936 |
| 摘要 | Industrial robots with six degrees-of-freedom have significant potential for use in optical manufacturing owing to their flexibility, low cost, and high space utilisation. However, the low trajectory accuracy of robots affects the manufacturing accuracy of optical components when combined with magnetorheological finishing (MRF). Moreover, general robot trajectory-error compensation methods cannot compensate for the running errors of large robots with high precision. To address this problem, a three-dimensional (3D) tool influence function (TIF) model based on inverse distance interpolation is developed in this study to accurately predict the TIF of different polishing gaps. A high-precision robot-MRF polishing strategy based on variable TIFs and surface shape accuracy of polished optics is proposed to achieve high-precision manufacturing without compensating for trajectory errors. Subsequently, the accuracy of a 420 mm fused silica mirror is experimentally verified to be from 0.11 λ RMS to 0.013 λ RMS. This validates that the robot-MRF can achieve high-precision polishing without compensating for trajectory errors. Furthermore, the proposed model will promote the applications of industrial robots in optical manufacturing and will serve as a reference in the field of intelligent optical manufacturing. © 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement. |
| DOI | 10.1364/OE.498458 |
| URL | 查看原文 |
| 收录类别 | sci ; ei |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/67400 |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | R. Cheng, L. Li, D. Xue, X. Li, Y. Bai, X. Luo and X. Zhang. Accurately predicting the tool influence function to achieve high-precision magnetorheological finishing using robots[J]. Optics Express,2023,31(21):34917-34936. |
| APA | R. Cheng, L. Li, D. Xue, X. Li, Y. Bai, X. Luo and X. Zhang.(2023).Accurately predicting the tool influence function to achieve high-precision magnetorheological finishing using robots.Optics Express,31(21),34917-34936. |
| MLA | R. Cheng, L. Li, D. Xue, X. Li, Y. Bai, X. Luo and X. Zhang."Accurately predicting the tool influence function to achieve high-precision magnetorheological finishing using robots".Optics Express 31.21(2023):34917-34936. |
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| Accurately predictin（11855KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
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