Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control

doi:10.37188/OPE.20233118.2675

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	Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control
	Y. Chen, L. Lai, P. Li and L. Zhu
	2023
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	31 期号:18 页码:2675-2686
摘要	To address the drawbacks of the traditional micropositioning stage， such as the small range of motion， low motion accuracy caused by parasitic motion， and serious cross-axis coupling， this paper proposes a full leaf-spring parallel flexure decoupling micropositioning stage driven by a voice coil motor with large-stroke and multiple degrees of freedom （multi-DOF）. First， the structure and deformation principle of the long-stroke multi-DOF parallel flexure mechanism with a leaf-spring type flexure spherical joint are introduced. Second， considering 3-DOF as an example， the kinematic equation of the moving platform is derived， the input stiffness model of the mechanism is established， and the compliance modeling and design of the flexure spherical joint are provided based on the compliance matrix method to determine the parameters of the micropositioning stage. Additionally， the models of the system dynamics are identified for 3-DOF. On the basis of the models， a composite controller of phase advanced proportional-integral （PI） feedback control combined with sliding mode feedforward control is designed. Finally， a stage experimental system is developed to verify its trajectory tracking performance. Experimental results indicate that， compared with the classical proportional-integral-derivative （PID） control， the compound control method can improve the track tracking performance by more than 95% and that the added sliding mode feedforward effectively eliminates the phase lag caused by simple feedback control. Meanwhile， the proposed multi-DOF micropositioning stage can achieve a motion with ±3.23 mm×±21.50 mrad×±20.30 mrad. It has the characteristics of large stroke， good stability， and high accuracy， which are applicable in many spatial positioning situations that require large travel and high accuracy. © 2023 Chinese Academy of Sciences. All rights reserved.
DOI	10.37188/OPE.20233118.2675
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收录类别	ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67389
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Chen, L. Lai, P. Li and L. Zhu. Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2023,31(18):2675-2686.
APA	Y. Chen, L. Lai, P. Li and L. Zhu.(2023).Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,31(18),2675-2686.
MLA	Y. Chen, L. Lai, P. Li and L. Zhu."Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 31.18(2023):2675-2686.

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