Method to construct the initial structure of optical systems based on full-field aberration correction

doi:10.1364/AO.488647

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	Method to construct the initial structure of optical systems based on full-field aberration correction
	X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang
	2023
发表期刊	Applied Optics
ISSN	1559128X
卷号	62 期号:17 页码:4571-4582
摘要	To meet full-field image quality requirements for extremely lowaberration optical systems, an initial structure construction method for reflective optical systems based on full-field aberration correction is proposed. The aberration of the full field is used as the main evaluation criterion in this method. A multi-field evaluation function is established using the aberration values of multiple characteristic field points to represent the full-field imaging quality, and spatial ray tracing is introduced to constrain the optical system structure.Multi-objective optimization of the evaluation function is performed using a combinatorial nondominated sorting and metaheuristics algorithm; an initial optical system with a reasonable structure and corrected third-order aberrations over the full field is subsequently obtained. After optimization, an extreme ultraviolet lithography objective with a numerical aperture of 0.33 and root-mean-square wavefront error of 0.128 nm (1=105λ; λD13.5 nm) is obtained. © 2023 Optica Publishing Group.
DOI	10.1364/AO.488647
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收录类别	sci ; ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67384
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang. Method to construct the initial structure of optical systems based on full-field aberration correction[J]. Applied Optics,2023,62(17):4571-4582.
APA	X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang.(2023).Method to construct the initial structure of optical systems based on full-field aberration correction.Applied Optics,62(17),4571-4582.
MLA	X. Chen, X. Zhang, Z. Su, J. Yu and L. Wang."Method to construct the initial structure of optical systems based on full-field aberration correction".Applied Optics 62.17(2023):4571-4582.

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