Research Progress in Gallium Based Oxide Thin Film Solar-blind Ultraviolet Photodetectors

doi:10.37188/CJL.20230146

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	Research Progress in Gallium Based Oxide Thin Film Solar-blind Ultraviolet Photodetectors
	X. Chen, Z. Cheng, K. Liu and D. Shen
	2023
发表期刊	Faguang Xuebao/Chinese Journal of Luminescence
ISSN	10007032
卷号	44 期号:7 页码:1167-1185
摘要	Solar-blind ultraviolet photodetectors have broad application prospects in the fields of national defense and civilian use. The solar-blind ultraviolet photodetectors based on wide bandgap semiconductor materials are recognized as new generation of ultraviolet detector with the characteristics of no expensive filter， low working voltage， all-solid-state， small size， light weight， strong anti-interference ability， and wide operating temperature range. Among these wide bandgap semiconductors， gallium containing oxides with Ga2O3 as a typical representative have become research hotspot in the field of microelectronics and optoelectronics because of their excellent electrical and optoelectronic properties， especially their unique characteristics such as intrinsic solar-blind， high temperature resistance， high pressure resistance and good chemical stability， which makes such materials show great potential in the field of solar-blind ultraviolet photodetectors. In view of this， this article reviews the research progress in the past five years of gallium-based oxide films such as Ga2O3 with different crystal structures， gallate oxide， gallium aluminum （or tin， indium） oxide and their solar blind ultraviolet detectors. © 2023 Chines Academy of Sciences. All rights reserved.
DOI	10.37188/CJL.20230146
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收录类别	ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67379
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Chen, Z. Cheng, K. Liu and D. Shen. Research Progress in Gallium Based Oxide Thin Film Solar-blind Ultraviolet Photodetectors[J]. Faguang Xuebao/Chinese Journal of Luminescence,2023,44(7):1167-1185.
APA	X. Chen, Z. Cheng, K. Liu and D. Shen.(2023).Research Progress in Gallium Based Oxide Thin Film Solar-blind Ultraviolet Photodetectors.Faguang Xuebao/Chinese Journal of Luminescence,44(7),1167-1185.
MLA	X. Chen, Z. Cheng, K. Liu and D. Shen."Research Progress in Gallium Based Oxide Thin Film Solar-blind Ultraviolet Photodetectors".Faguang Xuebao/Chinese Journal of Luminescence 44.7(2023):1167-1185.

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