中国科学院长春光学精密机械与物理研究所

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	Structure design and wavelength repeatability analysis of tunable high-resolution monochromator based on concave grating
	J. Chen, X. Yang, Y. Sun, J. Li and G. Lin
	2023
发表期刊	Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument
ISSN	02543087
卷号	44期号:2页码:59-66
摘要	Concave grating has both imaging and dispersion capabilities, monochromators using concave gratings are well miniaturised and can be applied to the vacuum UV band below 200 nm. The spectral resolution and wavelength repeatability are important indicators of monochromators, for the spectral resolution of monochromators, this paper combines the intrinsic resolution of the grating and the broadening caused by the slit to derive a model for calculating the spectral resolution of monochromators. Experimental verification using our own micro-motion slit, the monochromator resolution is in accordance with the theoretical model, with a limit resolution better than 0. 1 nm. For the wavelength repeatability of monochromator, the wavelength repeatability influencing factors are analyzed on the basis of the conversion of monochromator optical machine structure parameters, the wavelength repeatability calculation model of monochromator is derived, and the wavelength repeatability using mercury lamp as the light source is verified to be better than 0. 02 nm in accordance with the theoretical calculation model, which verify the validity of the structural design of the optical machine and the correctness of the theoretical analysis. © 2023 Science Press. All rights reserved.
DOI	10.19650/j.cnki.cjsi.J2210545
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收录类别	ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67369
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J. Chen, X. Yang, Y. Sun, J. Li and G. Lin. Structure design and wavelength repeatability analysis of tunable high-resolution monochromator based on concave grating[J]. Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,2023,44(2):59-66.
APA	J. Chen, X. Yang, Y. Sun, J. Li and G. Lin.(2023).Structure design and wavelength repeatability analysis of tunable high-resolution monochromator based on concave grating.Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,44(2),59-66.
MLA	J. Chen, X. Yang, Y. Sun, J. Li and G. Lin."Structure design and wavelength repeatability analysis of tunable high-resolution monochromator based on concave grating".Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument 44.2(2023):59-66.

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