A niobium pentoxide waveguide sensor for on-chip mid-infrared absorption spectroscopic methane measurement

doi:10.1016/j.snb.2023.133567

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	A niobium pentoxide waveguide sensor for on-chip mid-infrared absorption spectroscopic methane measurement
	R. Bi, M. Pi, C. Zheng, H. Zhao, L. Liang, F. Song, D. Wang, Y. Zhang, Y. Wang and F. K. Tittel
	2023
发表期刊	Sensors and Actuators B: Chemical
ISSN	09254005
卷号	382
摘要	The advantages of integrating infrared (IR) waveguide gas sensors on a chip include compactness, low power consumption, and high selectivity. Mid-IR waveguide sensors could be made of a variety of metal oxides with merits of low cost, high stability, transparency in the visible-IR spectrum, and non-toxicity. However, because most metal oxides have low refractive index, they are rarely used as waveguide core materials. To overcome this limitation, we chose niobium pentoxide (Nb2O5), a transparent material with high refractive index in the 0.35–10 µm wavelength range, as the core layer. We fabricated a Nb2O5 rectangular waveguide gas sensor using magnetron sputtering and lift-off process. The Nb2O5 waveguide with an external confinement factor of 11.5% was used for on-chip methane measurement at 3.291 µm based on wavelength modulation spectroscopy. A detection limit of 348 parts per million was achieved with an optimal averaging time of 61.2 s for a 2 cm long waveguide. The reported Nb2O5 waveguide gas sensor not only broadens the waveguide sensor core material family from silicon, chalcogenide (ChG) glass to metal oxides, but also provides detailed preparation and characterization methods for such kind of waveguide device. © 2023 Elsevier B.V.
DOI	10.1016/j.snb.2023.133567
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收录类别	sci ; ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67345
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	R. Bi, M. Pi, C. Zheng, H. Zhao, L. Liang, F. Song, D. Wang, Y. Zhang, Y. Wang and F. K. Tittel. A niobium pentoxide waveguide sensor for on-chip mid-infrared absorption spectroscopic methane measurement[J]. Sensors and Actuators B: Chemical,2023,382.
APA	R. Bi, M. Pi, C. Zheng, H. Zhao, L. Liang, F. Song, D. Wang, Y. Zhang, Y. Wang and F. K. Tittel.(2023).A niobium pentoxide waveguide sensor for on-chip mid-infrared absorption spectroscopic methane measurement.Sensors and Actuators B: Chemical,382.
MLA	R. Bi, M. Pi, C. Zheng, H. Zhao, L. Liang, F. Song, D. Wang, Y. Zhang, Y. Wang and F. K. Tittel."A niobium pentoxide waveguide sensor for on-chip mid-infrared absorption spectroscopic methane measurement".Sensors and Actuators B: Chemical 382(2023).

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