A wide bandwidth real-time MEMS optical power meter with high resolution and linearity

doi:10.1016/j.sna.2022.113506

CIOMP OpenIR

	A wide bandwidth real-time MEMS optical power meter with high resolution and linearity
	X. Chen; H. R. Wang and X. Y. Wei
	2022
发表期刊	Sensors and Actuators a-Physical
ISSN	0924-4247
卷号	339 页码:6
摘要	This paper presents a new type of wide bandwidth real-time micromechanical optical power meter based on a micro silicon disk resonator. The resonant frequency of micromechanical resonator is ultrasensitive with its heat absorption, which is verified by both simulation and experiment, including the open-loop and closed-loop testings. The resonant frequency of both the elliptical mode and contour mode of the disk resonator will shift when lasers of 488 nm and 1550 nm with different power are irradiated. The detector shows different heat absorption efficiency depending on the wavelength of the measured optical signal. The heat absorption efficiency was tested with 488 nm and 1550 nm laser irradiation in our experiments. According to our closed-loop experiments, the resolution of our detector could reach 78 nW, and a high linearity of R-2 = 0.99605 for the 488 nm target optical signal.
DOI	10.1016/j.sna.2022.113506
URL	查看原文
收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67246
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Chen,H. R. Wang and X. Y. Wei. A wide bandwidth real-time MEMS optical power meter with high resolution and linearity[J]. Sensors and Actuators a-Physical,2022,339:6.
APA	X. Chen,&H. R. Wang and X. Y. Wei.(2022).A wide bandwidth real-time MEMS optical power meter with high resolution and linearity.Sensors and Actuators a-Physical,339,6.
MLA	X. Chen,et al."A wide bandwidth real-time MEMS optical power meter with high resolution and linearity".Sensors and Actuators a-Physical 339(2022):6.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
A wide bandwidth rea（2546KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载