Vacuum Ultraviolet Photodetector with Low Dark Current and Fast Response Speed Based on Polycrystalline AlN Thin Film

doi:10.1002/pssr.202200343

CIOMP OpenIR

	Vacuum Ultraviolet Photodetector with Low Dark Current and Fast Response Speed Based on Polycrystalline AlN Thin Film
	P. X. Zhang; K. W. Liu; Y. X. Zhu; Q. Ai; J. L. Yang; X. Chen; Z. Cheng; B. H. Li; L. Liu and D. Z. Shen
	2022
Source Publication	Physica Status Solidi-Rapid Research Letters
ISSN	1862-6254
Pages	6
Abstract	A metal-semiconductor-metal (MSM) vacuum ultraviolet (VUV) photodetector is realized on polycrystalline AlN film grown by molecular beam epitaxy. At a bias of 10 V, the dark current of the device is less than 120 fA and the VUV (185 nm) to Ultraviolet-C (255 nm) rejection ratio is more than 10(3). More interestingly, the polycrystalline AlN photodetector shows an ultra-fast response speed with a 90%-10% decay time of approximate to 50 ns, which is much quicker than any other previously reported AlN VUV photodetectors. Furthermore, the device still maintains stability and repeatability at 473 K. This research shows that polycrystalline AlN photodetector has good photodetection performance, which will help advance the design and preparation of AlN-based VUV photodetectors.
DOI	10.1002/pssr.202200343
URL	查看原文
Indexed By	sci ; ei
Language	英语
Citation statistics
Document Type	期刊论文
Identifier	http://ir.ciomp.ac.cn/handle/181722/67225
Collection	中国科学院长春光学精密机械与物理研究所
Recommended Citation GB/T 7714	P. X. Zhang,K. W. Liu,Y. X. Zhu,et al. Vacuum Ultraviolet Photodetector with Low Dark Current and Fast Response Speed Based on Polycrystalline AlN Thin Film[J]. Physica Status Solidi-Rapid Research Letters,2022:6.
APA	P. X. Zhang.,K. W. Liu.,Y. X. Zhu.,Q. Ai.,J. L. Yang.,...&L. Liu and D. Z. Shen.(2022).Vacuum Ultraviolet Photodetector with Low Dark Current and Fast Response Speed Based on Polycrystalline AlN Thin Film.Physica Status Solidi-Rapid Research Letters,6.
MLA	P. X. Zhang,et al."Vacuum Ultraviolet Photodetector with Low Dark Current and Fast Response Speed Based on Polycrystalline AlN Thin Film".Physica Status Solidi-Rapid Research Letters (2022):6.

Files in This Item:		Download All
File Name/Size	DocType	Version	Access	License
Vacuum Ultraviolet P（2366KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	View Download

File name:	Vacuum Ultraviolet Photodetector with Low Dark.pdf
Format:	Adobe PDF

If you have any objections to this item, please fill out the form below and the administrator will contact you as soon as possible.
Content:
Email：	*
Institution:
Verification Code:	Refresh

Any comments and suggestions are welcomed.
Title:	*
Content:
Email：	*
Verification Code:	Refresh

中国科学院长春光学精密机械与物理研究所