Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors

doi:10.1007/s12217-022-10017-w

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	Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors
	C. Y. Wang; W. Liu; Y. Niu; W. Sha and Z. R. Luo
	2022
发表期刊	Microgravity Science and Technology
ISSN	0938-0108
卷号	34 期号:5 页码:6
摘要	The residual stress information of the precision surface optical device with a metal coating plays an important role in precision optical manufacturing. However, the conventional optical-based non-contact approaches fail to measure the stress less than MPa for such devices, which is required for high precision gravitational waves detection. To solve this problem, we use ellipsometry to detect the stress of a gold coating reflection mirrors as the first trial. Under the pseudo-Brewster angle of the gold, the stress sensitivity for the ellipsometry amplitude psi reaches 35 kPa. The results suggest the traditional reflection ellipsometry responses at two specific orthogonal directions can be used to measure the strain-induced dielectric function tensor variations under a uniaxial stress situation. A preliminary microscopic model based on Drude model is proposed to derive the relationship between the dielectric function tensor variation of the coating and the uniaxial tensile strain s. Thus, the reflection ellipsometry can be used as an alternative method for the residual stress detection for the high precision planar optical devices with metal coatings under a uniaxial stress condition.
DOI	10.1007/s12217-022-10017-w
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收录类别	sci
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67224
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C. Y. Wang,W. Liu,Y. Niu,et al. Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors[J]. Microgravity Science and Technology,2022,34(5):6.
APA	C. Y. Wang,W. Liu,Y. Niu,&W. Sha and Z. R. Luo.(2022).Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors.Microgravity Science and Technology,34(5),6.
MLA	C. Y. Wang,et al."Using the Reflection Ellipsometry to Detect the Stress for the Gold Coating Reflection Mirrors".Microgravity Science and Technology 34.5(2022):6.

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