Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging

doi:10.1364/oe.446733

CIOMP OpenIR

	Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging
	L. X. Zhang; Y. Z. Li; B. S. Chen; Y. B. Wang; H. M. Li; Y. Hou; M. Tao; Y. X. Li; Z. H. Zhi; X. B. Liu; X. T. Li; Q. X. Na; Q. J. Xie; M. S. Zhang; X. Y. Li; F. L. Gao; X. S. Luo; G. Q. Lo and J. F. Song
	2022
发表期刊	Optics Express
ISSN	1094-4087
卷号	30 期号:4 页码:5008-5018
摘要	Silicon based optoelectronic integrated optical phased array is attractive owing to large-dense integration, large scanning range and CMOS compatibility. In this paper, we design and fabricate a SiN-on-SOI two-dimensional optical phased array chip. We demonstrate a two-dimensional scanning range of 96 degrees x14.4 degrees and 690 mW peak power of the main lobe. Additionally, we set up the time of flight (ToF) and frequency-modulated continuous-wave (FMCW) ranging systems by using this optical phased array chip, and achieve the objects detection at the range of 20 m in the ToF system and 109 m in the FMCW system, respectively. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
DOI	10.1364/oe.446733
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收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67202
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L. X. Zhang,Y. Z. Li,B. S. Chen,et al. Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging[J]. Optics Express,2022,30(4):5008-5018.
APA	L. X. Zhang.,Y. Z. Li.,B. S. Chen.,Y. B. Wang.,H. M. Li.,...&G. Q. Lo and J. F. Song.(2022).Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging.Optics Express,30(4),5008-5018.
MLA	L. X. Zhang,et al."Two-dimensional multi-layered SiN-on-SOI optical phased array with wide-scanning and long-distance ranging".Optics Express 30.4(2022):5008-5018.

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