Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography

doi:10.3390/app12157946

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	Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography
	Y. Song; N. Zhang; Y. J. Liu; L. Zhang and Z. W. Liu
	2022
发表期刊	Applied Sciences-Basel
卷号	12 期号:15 页码:13
摘要	Variable-period scanning beam interference lithography (VP-SBIL) can be used to fabricate varied-line-spacing (VLS) plane gratings. The exposure phase modulation method to pattern a VLS grating with a desired groove density must be carefully devised. In this paper, a mathematical model of the total exposure dose for VLS plane grating fabrication is established. With model-based numerical calculations, the phase modulation effects of the parameters, including the fringe locked phase, fringe density, and step size, are analyzed. The parameter combinations for the phase modulation are compared and chosen, and the optimal coordinate for phase compensation is selected. The calculation results show that the theoretical errors of the groove density coefficients can be controlled within 1e-8. The mathematical model can represent the deposited exposure dose for patterning VLS gratings during the lithography process, and the chosen parameters and proposed phase modulation method are appropriate for patterning VLS gratings with VP-SBIL.
DOI	10.3390/app12157946
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收录类别	sci
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67163
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Song,N. Zhang,Y. J. Liu,et al. Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography[J]. Applied Sciences-Basel,2022,12(15):13.
APA	Y. Song,N. Zhang,Y. J. Liu,&L. Zhang and Z. W. Liu.(2022).Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography.Applied Sciences-Basel,12(15),13.
MLA	Y. Song,et al."Theoretical Exposure Dose Modeling and Phase Modulation to Pattern a VLS Plane Grating with Variable-Period Scanning Beam Interference Lithography".Applied Sciences-Basel 12.15(2022):13.

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