CIOMP OpenIR
Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy
M. Q. Pi; Y. J. Huang; H. Zhao; Z. H. Peng; J. M. Lang; J. L. Ji; L. Teng; F. Song; L. Liang; Y. Zhang; C. T. Zheng; Y. D. Wang and F. K. Tittel
2022
Source PublicationSensors and Actuators B-Chemical
Volume362Pages:10
AbstractCompared with direct absorption spectroscopy (DAS), wavelength modulation spectroscopy (WMS) with good ability of suppressing noise is rarely used in waveguide sensor. The influence of waveguide parameters on WMS sensing performance is required to clarify in both theory and experiment. Three mid-infrared waveguide methane (CH4) sensors (trapezoid, rectangular, suspended) were proposed and optimized for WMS simulation. Theoretical formulation and the experimentally derived sensing noise were used to numerically evaluate the key figure of merit more accurately. Simulation results were presented to show the influence of waveguide parameters on sensing performance. Two chalcogenide on magnesium fluoride (ChG-on-MgF2) trapezoid waveguide CH4 sensors were fabricated using lift-off method, and CH4 measurement was carried out using WMS. The waveguide loss was measured to be 1.52 dB/cm, leading to an optimal sensor length of 2.7 cm. The limit of detection (LoD) of CH4 for the 1cm- and 2cm-long waveguide sensors are 0.68% and 0.17% with an averaging time of 0.2 s. The experimentally achieved second harmonic (2f) signal amplitude and LoD show good agreement with the theoretical results, verifying the feasibility of the design and analysis model of the WMS-based waveguide sensor. Due to the use of WMS and a reduction of waveguide loss from 3.6 to 1.52 dB/cm, the LoD of the 2cm-long ChG-on-MgF2 sensor is 24 times lower than our previously reported 2cm-long ChG-on-SiO2 sensor based on DAS. This work provides a systematic guidance for the design of waveguide gas sensor based on WMS and contributes to improving the sensitivity of on-chip gas sensing.
DOI10.1016/j.snb.2022.131782
URL查看原文
Indexed Bysci ; ei
Language英语
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/67161
Collection中国科学院长春光学精密机械与物理研究所
Recommended Citation
GB/T 7714
M. Q. Pi,Y. J. Huang,H. Zhao,et al. Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy[J]. Sensors and Actuators B-Chemical,2022,362:10.
APA M. Q. Pi.,Y. J. Huang.,H. Zhao.,Z. H. Peng.,J. M. Lang.,...&Y. D. Wang and F. K. Tittel.(2022).Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy.Sensors and Actuators B-Chemical,362,10.
MLA M. Q. Pi,et al."Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy".Sensors and Actuators B-Chemical 362(2022):10.
Files in This Item:
File Name/Size DocType Version Access License
Theoretical and expe(5476KB)期刊论文出版稿开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[M. Q. Pi]'s Articles
[Y. J. Huang]'s Articles
[H. Zhao]'s Articles
Baidu academic
Similar articles in Baidu academic
[M. Q. Pi]'s Articles
[Y. J. Huang]'s Articles
[H. Zhao]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[M. Q. Pi]'s Articles
[Y. J. Huang]'s Articles
[H. Zhao]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.