Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling

doi:10.1515/nanoph-2021-0329

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	Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling
	H. B. Xie; B. Zhao; J. L. Cheng; S. K. Chamoli; T. T. Zou; W. Xin and J. J. Yang
	2021
发表期刊	Nanophotonics
ISSN	2192-8606
卷号	10 期号:15 页码:3831-3842
摘要	Advances in femtosecond laser-material interaction facilitate the extension of maskless optical processing to the high efficiency and deep-subwavelength scale. Here, a hybrid plasmon lithography technique has been demonstrated by irradiating near-infrared femtosecond laser pulses onto the Si material coated with thin Cr films in a vacuum chamber, and superior nanograting structures are found to deeply penetrate through the thin Cr film into the underlying Si substrate. In stark contrast to the common ripple structures formed on the Si surface, the Cr-layer mediated Si nanograting structures not only exhibit the spatially super-regular arrangements with a deep-subwavelength period of 355 nm but also present the nonsinusoidal sharp-edged groove geometry with a large depth-to-width aspect ratio of 2.1. Theoretical analyses and calculations reveal that the anomalous structure characterizations are physically ascribed to the excitation of dual-interface coupled plasmons in the thin metal layer, which possess the squeezed spatial wavelength and the periodic columnar intensity distributions. Moreover, the further deepening of periodic nanostructures into the Si substrate is also elucidated by the simulation of electric field enhancements at the bottom of shallow grooves under irradiation of subsequent laser pulses. In combination with a wet etching process, the Si nanograting structures can be modified into the smooth and narrow-mouthed V-profiles, whose optical measurements show a near omnidirectional antireflection especially in the visible range of 565-750 nm, which is expected for the design of advanced photonic devices.
DOI	10.1515/nanoph-2021-0329
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收录类别	sci
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67130
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. B. Xie,B. Zhao,J. L. Cheng,et al. Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling[J]. Nanophotonics,2021,10(15):3831-3842.
APA	H. B. Xie,B. Zhao,J. L. Cheng,S. K. Chamoli,T. T. Zou,&W. Xin and J. J. Yang.(2021).Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling.Nanophotonics,10(15),3831-3842.
MLA	H. B. Xie,et al."Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling".Nanophotonics 10.15(2021):3831-3842.

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