Single beta-Ga2O3 microbelt solar-blind photodetector with high specific detectivity, high rejection ratio and fast speed

doi:10.1088/1361-6463/ac77c9

CIOMP OpenIR

	Single beta-Ga2O3 microbelt solar-blind photodetector with high specific detectivity, high rejection ratio and fast speed
	Z. Y. Zheng; K. W. Liu; Z. Cheng; B. S. Qiao; X. Chen; C. Zhou; J. L. Yang; Q. Ai; Y. X. Zhu; B. H. Li; L. Liu and D. Z. Shen
	2022
发表期刊	Journal of Physics D-Applied Physics
ISSN	0022-3727
卷号	55 期号:36 页码:8
摘要	An ideal solar-blind photodetector should possess high responsivity, low dark current, high speed, high spectral selectivity, high stability and a facile fabrication method. In this work, a high-quality single beta-Ga2O3 microbelt photodetector is fabricated through low-pressure chemical vapor deposition and in situ atmospheric pressure annealing techniques. Due to the high quality and low defect density, this device shows a peak responsivity of 9.47 A W-1 at 256 nm, a dark current of 1 pA and an ultrashort fall time of 1.37 mu s under 20 V bias. Moreover, an ultrahigh specific detectivity of similar to 10(14) Jones and an extremely large solar-blind/ultraviolet A rejection ratio of nearly 10(5) have also been achieved, suggesting the excellent sensitivity and wavelength selectivity of our single beta-Ga2O3 microbelt photodetector. Besides that, the beta-Ga2O3 microbelt photodetector exhibits excellent mechanical and long-term stabilities. Our findings provide a facile and promising route to develop high performance solar-blind UV photodetectors.
DOI	10.1088/1361-6463/ac77c9
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收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67082
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z. Y. Zheng,K. W. Liu,Z. Cheng,et al. Single beta-Ga2O3 microbelt solar-blind photodetector with high specific detectivity, high rejection ratio and fast speed[J]. Journal of Physics D-Applied Physics,2022,55(36):8.
APA	Z. Y. Zheng.,K. W. Liu.,Z. Cheng.,B. S. Qiao.,X. Chen.,...&L. Liu and D. Z. Shen.(2022).Single beta-Ga2O3 microbelt solar-blind photodetector with high specific detectivity, high rejection ratio and fast speed.Journal of Physics D-Applied Physics,55(36),8.
MLA	Z. Y. Zheng,et al."Single beta-Ga2O3 microbelt solar-blind photodetector with high specific detectivity, high rejection ratio and fast speed".Journal of Physics D-Applied Physics 55.36(2022):8.

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