Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide

doi:10.37188/CO.2022-0132

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	Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide
	X. Chen; C. Zhou; K.-W. Liu and D.-Z. Shen
	2022
发表期刊	Chinese Optics
ISSN	20971842
卷号	15 期号:5 页码:912-928
摘要	Ultraviolet photodetection technology is another dual-use detection technology after infrared detection and laser detection technology, which has broad application prospects. Vacuum photomultiplier tubes and Si-based photodiodes are common commercial UV detectors, but vacuum photomultiplier tubes are susceptible to high temperatures and electromagnetic radiation, and need to work under high pressure while Si-based photodiodes require expensive filters. Wide bandgap semiconductor ultraviolet photodetectors have overcome some of the problems faced by the above two devices, and are becoming the research hotspot. Among them, wide bandgap oxide materials have attracted extensive attention, due to the advantages of easy preparation for high response and high gain devices, and rich micro-structures and nano-structures. In this paper, ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide are combed, and some related researches in recent years are reviewed. The oxide materials involved include ZnO, Ga2O3, SnO2 and TiO2, etc. and the device structures involved include metal-semiconductor-metal devices, Schottky junction devices and heterojunction devices, etc. 2022 Editorial Office of Chinese Optics. All rights reserved.
DOI	10.37188/CO.2022-0132
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收录类别	ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67063
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Chen,C. Zhou,K.-W. Liu and D.-Z. Shen. Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide[J]. Chinese Optics,2022,15(5):912-928.
APA	X. Chen,C. Zhou,&K.-W. Liu and D.-Z. Shen.(2022).Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide.Chinese Optics,15(5),912-928.
MLA	X. Chen,et al."Review of ultraviolet photodetectors based on micro/nano-structured wide bandgap semiconductor oxide".Chinese Optics 15.5(2022):912-928.

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