中国科学院长春光学精密机械与物理研究所

QQ客服 官方微博 反馈留言

	Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System
	Z. Y. Wang; T. Y. Wang; Y. Q. Yang; Y. K. Yang; X. T. Mi and J. L. Wang
	2022
发表期刊	Sensors
卷号	22期号:18页码:24
摘要	To improve the accuracy of three-dimensional (3D) surface contour measurements of freeform optics, a two-dimensional (2D) tilt measurement sensor for confocal microscopy (CM) systems is proposed based on a double-cylindrical mirror structure. First, the proposed system is accurately modeled. Second, we introduce a modified mean-shift-based peak-extraction algorithm with a novel kernel function (MSN) because the reflectivity of the measured object and fluctuation of the light source affect the measurement accuracy. Third, a partition fitting (PF) strategy is proposed to reduce the fitting error and improve the measurement accuracy. Simulations and experiments reveal that the robustness, speed, and angular prediction accuracy of the system effectively improved as a function of MSN and PF. The developed sensor can measure the 2D tilt, where each tilt is a composition of two separate dimensions, and the mean prediction errors in the 2D plane from -10 degrees-+10 degrees are 0.0134 degrees (0.067% full scale (F.S)) and 0.0142 degrees (0.071% F.S). The sensor enables the optical probe of a traditional CM to obtain accurate and simultaneous estimates of the 2D inclination angle and spatial position coordinates of the measured surface. The proposed sensor has potential in 3D topographic reconstruction and dynamic sampling rate optimization for 3D contour detection.
DOI	10.3390/s22186794
URL	查看原文
收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/67001
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z. Y. Wang,T. Y. Wang,Y. Q. Yang,et al. Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System[J]. Sensors,2022,22(18):24.
APA	Z. Y. Wang,T. Y. Wang,Y. Q. Yang,Y. K. Yang,&X. T. Mi and J. L. Wang.(2022).Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System.Sensors,22(18),24.
MLA	Z. Y. Wang,et al."Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System".Sensors 22.18(2022):24.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Precise Two-Dimensio（13335KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览 下载

个性服务

推荐该条目

保存到收藏夹

查看访问统计

导出为Endnote文件

谷歌学术

谷歌学术中相似的文章

[Z. Y. Wang]的文章

[T. Y. Wang]的文章

[Y. Q. Yang]的文章

百度学术

百度学术中相似的文章

[Z. Y. Wang]的文章

[T. Y. Wang]的文章

[Y. Q. Yang]的文章

必应学术

必应学术中相似的文章

[Z. Y. Wang]的文章

[T. Y. Wang]的文章

[Y. Q. Yang]的文章

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。