Polarization-modulated grating interferometer by conical diffraction

doi:10.1364/oe.438490

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	Polarization-modulated grating interferometer by conical diffraction
	L. Liu; Z. W. Liu; S. Jiang; W. Wang; H. Z. Yu; Y. X. Jiang and W. H. Li
	2022
发表期刊	Optics Express
ISSN	1094-4087
卷号	30 期号:2 页码:689-699
摘要	The grating interferometer in the Littrow configuration uses quarter wave plates (QWPs) to modulate the polarization in the measurement system to determine the autocollimation optical path. Fabrication errors and mounting errors of the QWPs lead to phase changes in the grating interferometer that generate measurement errors. As an alternative, we propose a grating interferometer that produces conical diffraction. Using the grating instead of QWPs to modulate the beam's polarization bypasses this source of error. A 45 mm range experiment was performed that yielded a repeated measurement error of 40 nm. Experiments show that the system has a simple structure and good repeatability and is capable of high-precision displacement measurements. (C) 2022 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
DOI	10.1364/oe.438490
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收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66995
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L. Liu,Z. W. Liu,S. Jiang,et al. Polarization-modulated grating interferometer by conical diffraction[J]. Optics Express,2022,30(2):689-699.
APA	L. Liu,Z. W. Liu,S. Jiang,W. Wang,H. Z. Yu,&Y. X. Jiang and W. H. Li.(2022).Polarization-modulated grating interferometer by conical diffraction.Optics Express,30(2),689-699.
MLA	L. Liu,et al."Polarization-modulated grating interferometer by conical diffraction".Optics Express 30.2(2022):689-699.

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