Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage

doi:10.1007/s12555-020-0564-9

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	Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage
	M. S. Cao; Y. M. Bo and H. B. Gao
	2022
发表期刊	International Journal of Control Automation and Systems
ISSN	1598-6446
卷号	20 期号:3 页码:741-749
摘要	Iterative learning control (ILC) is an efficient technique applicable to improving the tracking performance of systems that have a repetitive nature. In this paper, point-to-point movements with time-iteration-varying disturbances are considered instead. A new output-based adaptive ILC scheme consisting of an adaptive second-order ILC and an iterative learning estimation of time-iteration-varying disturbances is proposed for a class of linear systems with unknown parameters. The proposed algorithm is used to improve trajectory tracking performance without requiring a plant model or a sensitivity function, and without assuming the initial condition to be zero. In order to verify the proposed algorithm, it is applied to a wafer stage, and the obtained tracking performance is compared with that obtained using a traditional second-order ILC algorithm; better results are obtained using the proposed method.
DOI	10.1007/s12555-020-0564-9
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收录类别	sci ; ei
语种	英语
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66965
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. S. Cao,Y. M. Bo and H. B. Gao. Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage[J]. International Journal of Control Automation and Systems,2022,20(3):741-749.
APA	M. S. Cao,&Y. M. Bo and H. B. Gao.(2022).Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage.International Journal of Control Automation and Systems,20(3),741-749.
MLA	M. S. Cao,et al."Output-based Adaptive Iterative Learning Control of Uncertain Linear Systems Applied to a Wafer Stage".International Journal of Control Automation and Systems 20.3(2022):741-749.

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