Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System

doi:10.3807/copp.2022.6.3.236

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	Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System
	X. F. Liu; X. Zhang and F. X. Tian
	2022
发表期刊	Current Optics and Photonics
ISSN	2508-7266
卷号	6 期号:3 页码:236-243
摘要	Monocrystalline silicon has excellent properties, but it is difficult to design and manufacture silicon-based mirrors that can meet engineering applications because of its hard and brittle properties. This pa-per used monocrystalline silicon as the main mirror material in an imaging system to carry out a feasi-bility study. The lightweight design of the mirror is completed by the method of center support and edge cutting. The support structure of the mirror was designed to meet the conditions of wide temperature applications. Isight software was used to optimize the feasibility sample, and the optimized results are that the root mean square error of the mirror surface is 3.6 nm, the rigid body displacement of the mirror is 2.1 mu m, and the angular displacement is 2.5 '' under the conditions of a temperature of Delta 20 celcius and a gravity load of 1 g. The optimized result show that the silicon-based mirror developed in this paper can meet the requirements of engineering applications. This research on silicon-based mirrors can provide guidance for the application of other silicon-based mirrors.
DOI	10.3807/copp.2022.6.3.236
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收录类别	sci ; ei
语种	英语
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66961
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. F. Liu,X. Zhang and F. X. Tian. Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System[J]. Current Optics and Photonics,2022,6(3):236-243.
APA	X. F. Liu,&X. Zhang and F. X. Tian.(2022).Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System.Current Optics and Photonics,6(3),236-243.
MLA	X. F. Liu,et al."Opto-mechanical Design of Monocrystalline Silicon Mirror for a Reflective Imaging Optical System".Current Optics and Photonics 6.3(2022):236-243.

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