On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 mu m

doi:10.3389/fchem.2022.953684

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	On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 mu m
	H. Zhao; C. T. Zheng; M. Q. Pi; L. Liang; F. Song; Y. Zhang; Y. D. Wang and F. K. Tittel
	2022
发表期刊	Frontiers in Chemistry
ISSN	2296-2646
卷号	10 页码:11
摘要	Portable or even on-chip detection of methane (CH4) is significant for environmental protection and production safety. However, optical sensing systems are usually based on discrete optical elements, which makes them unsuitable for the occasions with high portability requirement. In this work, we report on-chip silicon-on-insulator (SOI) waveguide CH4 sensors at 3.291 mu m based on two measurement schemes including direct absorption spectroscopy (DAS) and wavelength modulation spectroscopy (WMS). In order to suppress noise, Kalman filter was adopted in signal processing. By optimizing the waveguide cross-section structure, an etch depth of 220 nm was selected with an experimentally high power confinement factor (PCF) of 23% and a low loss of only 0.71 dB/cm. A limit of detection (LoD) of 155 parts-per-million (ppm) by DAS and 78 ppm by WMS at an averaging time of 0.2 s were obtained for a 2 cm-long waveguide sensor. Compared to the chalcogenide (ChG) waveguide CH4 sensors at the same wavelength, the reported sensor reveals the minimum waveguide loss and the lowest LoD. Therefore the SOI waveguide sensor has the potential of on-chip gas sensing in the mid-infrared (MIR) waveband.
DOI	10.3389/fchem.2022.953684
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收录类别	sci
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66934
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. Zhao,C. T. Zheng,M. Q. Pi,et al. On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 mu m[J]. Frontiers in Chemistry,2022,10:11.
APA	H. Zhao.,C. T. Zheng.,M. Q. Pi.,L. Liang.,F. Song.,...&Y. D. Wang and F. K. Tittel.(2022).On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 mu m.Frontiers in Chemistry,10,11.
MLA	H. Zhao,et al."On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 mu m".Frontiers in Chemistry 10(2022):11.

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