Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer

doi:10.1109/jsen.2021.3128534

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	Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer
	M. H. Zhao; Y. H. Qi; X. P. Zhang; B. Li; Z. D. Jiang and X. Y. Wei
	2022
发表期刊	Ieee Sensors Journal
ISSN	1530-437X
卷号	22 期号:1 页码:365-372
摘要	MEMS accelerometers based on the optical interference technique play an important role in seismic wave detection due to their high resolution, strong electromagnetic stability, and low cost. This paper reports a MEMS Fabry-Perot seismic accelerometer. The working principle and transfer function were established to introduce the accelerometer. Noise sources that contribute to the output of the accelerometer were analyzed and predicted. To improve the performance of the accelerometer, the active temperature compensation, the appropriate laser driving current selection, and the laser modulation-demodulation technologies were adopted to reduce the noise. Experimental results show that the noise floor of the accelerometer was decreased from 11 mu g/root Hz@1 Hz to 330 ng/root Hz@1 Hz.
DOI	10.1109/jsen.2021.3128534
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收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66908
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. H. Zhao,Y. H. Qi,X. P. Zhang,et al. Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer[J]. Ieee Sensors Journal,2022,22(1):365-372.
APA	M. H. Zhao,Y. H. Qi,X. P. Zhang,B. Li,&Z. D. Jiang and X. Y. Wei.(2022).Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer.Ieee Sensors Journal,22(1),365-372.
MLA	M. H. Zhao,et al."Noise Analysis and Performance Improvement of a MEMS Fabry-Perot Seismic Accelerometer".Ieee Sensors Journal 22.1(2022):365-372.

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