MOCVD growth of MgGa2O4 thin films for high-performance solar-blind UV photodetectors

doi:10.1063/5.0077904

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	MOCVD growth of MgGa2O4 thin films for high-performance solar-blind UV photodetectors
	Q. C. Hou; K. W. Liu; D. Y. Han; Y. X. Zhu; X. Chen; B. H. Li; L. Liu and D. Z. Shen
	2022
发表期刊	Applied Physics Letters
ISSN	0003-6951
卷号	120 期号:1 页码:6
摘要	Epitaxial MgGa2O4 thin films with a bandgap of 5.18 eV were grown on the c-plane sapphire substrate by using metal organic chemical vapor deposition. The structure, optical, electronic, and optoelectronic properties of MgGa2O4 thin films have been investigated before and after high-temperature annealing in an oxygen or nitrogen atmosphere. In particular, the O-2-annealed MgGa2O4 thin film reveals a high crystalline quality and a low concentration of oxygen vacancies. Moreover, a quick response speed (t(r) = 20 ns, t(d) = 400 ns), a low dark current (& SIM;17 pA at 10 V), and a high UV/Visible rejection ratio (> 10(5)) can be demonstrated in the O-2-annealed MgGa2O4 photodetector, indicating the excellent solar-blind ultraviolet (SBUV) photodetection characteristics. The effect of annealing atmosphere on the photoelectric properties of the film and its physical mechanism were studied. This research provides an effective way to realize high-performance SBUV photodetectors and opens up the application of MgGa2O4 spinel in the field of semiconductor optoelectronic and microelectronic devices.
DOI	10.1063/5.0077904
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收录类别	sci ; ei
语种	英语
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66849
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Q. C. Hou,K. W. Liu,D. Y. Han,et al. MOCVD growth of MgGa2O4 thin films for high-performance solar-blind UV photodetectors[J]. Applied Physics Letters,2022,120(1):6.
APA	Q. C. Hou.,K. W. Liu.,D. Y. Han.,Y. X. Zhu.,X. Chen.,...&L. Liu and D. Z. Shen.(2022).MOCVD growth of MgGa2O4 thin films for high-performance solar-blind UV photodetectors.Applied Physics Letters,120(1),6.
MLA	Q. C. Hou,et al."MOCVD growth of MgGa2O4 thin films for high-performance solar-blind UV photodetectors".Applied Physics Letters 120.1(2022):6.

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