Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference

doi:10.1364/OE.475830

CIOMP OpenIR

	Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference
	Y. Yin; L. Liu; Y. Bai; Jirigalantu; H. Yu; Bayanheshig; Z. Liu and W. Li
	2022
发表期刊	Optics Express
ISSN	10944087
卷号	30 期号:23 页码:41671-41684
摘要	We propose a 3D measurement method based on 2D grating dual-channel and Littrow equal-optical path incidence to detect the 3D displacement of a 2D grating in the X-, Y-, and Z-directions. The 2D grating is combined with the Littrow incidence method and a turning element to cause the Littrow diffracted light with frequency f1 to interfere with the reference light at frequency f2, and the displacement data in the X-, Y-, and Z-directions are obtained using the separation-dual-channel phase decoupling algorithm. A corresponding test experimental platform is constructed, and linear error evaluation and step error evaluation experiments are performed to determine the displacements in the X-, Y-, and Z-directions. The results obtained show that all linearity errors are within 60 nm in the 10 mm measurement ranges in the X-, Y-, and Z-directions, and the test resolution is within 5 nm. The proposed method can thus realize nanoscale synchronous measurement of X-, Y-, and Z-direction 3D displacements. 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.
DOI	10.1364/OE.475830
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收录类别	ei
引用统计	被引频次：10[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66814
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Yin,L. Liu,Y. Bai,et al. Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference[J]. Optics Express,2022,30(23):41671-41684.
APA	Y. Yin.,L. Liu.,Y. Bai.,Jirigalantu.,H. Yu.,...&Z. Liu and W. Li.(2022).Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference.Optics Express,30(23),41671-41684.
MLA	Y. Yin,et al."Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference".Optics Express 30.23(2022):41671-41684.

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