Investigation of an innovative stitching-embedded characterization method for imprinting large-aperture continuous phase plates

doi:10.1016/j.precisioneng.2022.10.004

CIOMP OpenIR

	Investigation of an innovative stitching-embedded characterization method for imprinting large-aperture continuous phase plates
	P. Ji; B. Wang; Y. Jin; H. T. Zhang; Z. Qiao and D. Li
	2023
Source Publication	Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
ISSN	0141-6359
Volume	79 Pages:173-184
Abstract	In high-power laser systems, the large-aperture continuous phase plates (CPPs) are designed and fabricated with continuous varying structured topography to serve as the class of phase-modulating beam-conditioning optics. To achieve better optical performance, its fabrication highly depends on the reiterative figuring to eliminate the form error relative to the designed CPP surface. However, the characteristics of large aperture and complex structured topography make the quality inspection of CPPs still challenging. A typical inspection process includes measuring the CPPs with the sub-aperture stitching technique, followed by the characterization procedure with respect to the CPP design description. This paper proposes an innovative stitching-embedded characterization method for imprinting the large-aperture CPPs, which combines the sub-aperture stitching and characterization procedure together. First, the concept and mathematical model of the stitching-embedded characterization method is presented. Then, both numerical simulations and experiments were undertaken to verify the proposed method, and the results demonstrate its feasibility and reasonability to provide the more reliable form error evaluation while simplify the analysis procedure compared with the conventional inspection process.
DOI	10.1016/j.precisioneng.2022.10.004
URL	查看原文
Indexed By	sci
Language	英语
Citation statistics	Cited Times:1[WOS] [WOS Record] [Related Records in WOS]
Document Type	期刊论文
Identifier	http://ir.ciomp.ac.cn/handle/181722/66775
Collection	中国科学院长春光学精密机械与物理研究所
Recommended Citation GB/T 7714	P. Ji,B. Wang,Y. Jin,et al. Investigation of an innovative stitching-embedded characterization method for imprinting large-aperture continuous phase plates[J]. Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology,2023,79:173-184.
APA	P. Ji,B. Wang,Y. Jin,H. T. Zhang,&Z. Qiao and D. Li.(2023).Investigation of an innovative stitching-embedded characterization method for imprinting large-aperture continuous phase plates.Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology,79,173-184.
MLA	P. Ji,et al."Investigation of an innovative stitching-embedded characterization method for imprinting large-aperture continuous phase plates".Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology 79(2023):173-184.

Files in This Item:		Download All
File Name/Size	DocType	Version	Access	License
Investigation of an （15363KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	View Download

File name:	Investigation of an innovative stitching-embedded characterization method for imprinting large-aperture continuous phase plates.pdf
Format:	Adobe PDF

If you have any objections to this item, please fill out the form below and the administrator will contact you as soon as possible.
Content:
Email：	*
Institution:
Verification Code:	Refresh

Any comments and suggestions are welcomed.
Title:	*
Content:
Email：	*
Verification Code:	Refresh

中国科学院长春光学精密机械与物理研究所