Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation

doi:10.37188/OPE.20223013.1523

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	Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation
	S. Lu; M. Li; H. Hu; D. Xu and X. Zhang
	2022
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	30 期号:13 页码:1523-1533
摘要	The degradation of the detected wavefront during the propagation of the compensation optical path in the interferometric compensation detection system inevitably introduces interferometric coherent imaging aberration, causing the instrument transfer function to degrade sharply in the high frequency band and severely limiting the detection accuracy of interferometric compensation detection. In this study, an interferometric coherence imaging aberration model is developed to reveal the degradation mechanism of wavefront spatial frequency information caused by interferometric coherence imaging aberration. First, a non-rotationally symmetric wavefront propagation theory is proposed to describe the evolution mechanism of the non-rotationally symmetric wavefront. Second, the mathematical model of interferometric coherent imaging aberration is established by combining the hybrid analysis method of fine beam tracing and wavefront evolution, and the numerical value of the FM function under the condition of non-rotationally symmetric secondary wavefront propagation is realized to further establish the function relationship between the out-of-focus amount and wavefront distribution. Finally, the experimental verification of the model is completed using the interference compensation detection system. The experimental results show that the residuals of the actual and expected values are less than 0. 05 waves, the symmetric mean absolute percentage errorSMAPEof the model is 8. 26%, and the mean relative errorMREis 3. 35%therefore, the proposed model has a better fit than the theoretical one based on Talbot effect and Fresnel diffraction analysis proposed by the University of Arizona. The accuracy and predictability of the proposed model, which is important for improving the detection accuracy of interference compensation detection, are verified. 2022 Chinese Academy of Sciences. All rights reserved.
DOI	10.37188/OPE.20223013.1523
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66769
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S. Lu,M. Li,H. Hu,et al. Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2022,30(13):1523-1533.
APA	S. Lu,M. Li,H. Hu,&D. Xu and X. Zhang.(2022).Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,30(13),1523-1533.
MLA	S. Lu,et al."Interferometric coherence imaging aberration due to non-rotationally symmetric secondary wavefront degradation".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 30.13(2022):1523-1533.

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