Image signal denoising method of grating linear displacement sensor based on NLM

doi:10.1016/j.measurement.2022.111965

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	Image signal denoising method of grating linear displacement sensor based on NLM
	X. Gao; X. B. Zhang; K. W. Li and P. F. Wang
	2022
发表期刊	Measurement
ISSN	0263-2241
卷号	203 页码:10
摘要	To improve the measurement resolution and accuracy of the grating displacement sensor, this paper proposes an image signal denoising method of grating linear displacement sensors based on NLM. Firstly, the optical system is designed to load the displacement information into the fringe image based on the grating pitch; Then, the principle of NLM image denoising is studied, and the inverse ratio kernel NLM denoising algorithm is designed; Thirdly, the effect of denoising algorithm is compared with the typical kernel function; Finally, the optimized image is used for displacement demodulation. The experimental results show that the SNR of the image is 30.1370db after denoising by this algorithm, and the high-precision displacement stage is set at 20 nm, 40 nm, and, 60 nm. Using the method in this paper, the positioning can be calculated to 22.7 nm, 38.2 nm, and 63.3 nm, and the sub-pixel positioning of the image and the nanopositioning measurement of the displacement are completed.
DOI	10.1016/j.measurement.2022.111965
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收录类别	sci
语种	英语
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66747
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Gao,X. B. Zhang,K. W. Li and P. F. Wang. Image signal denoising method of grating linear displacement sensor based on NLM[J]. Measurement,2022,203:10.
APA	X. Gao,X. B. Zhang,&K. W. Li and P. F. Wang.(2022).Image signal denoising method of grating linear displacement sensor based on NLM.Measurement,203,10.
MLA	X. Gao,et al."Image signal denoising method of grating linear displacement sensor based on NLM".Measurement 203(2022):10.

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