High-precision magnetorheological finishing based on robot by measuring and compensating trajectory error

doi:10.1364/OE.474959

CIOMP OpenIR

	High-precision magnetorheological finishing based on robot by measuring and compensating trajectory error
	R. Cheng; L. Li; X. Li; B. Yang; X. Luo; D. Xue and X. Zhang
	2022
发表期刊	Optics Express
ISSN	10944087
卷号	30 期号:25 页码:44741-44768
摘要	The 6-DOF industrial robot has wide application prospects in the field of optical manufacturing because of its high degrees of freedom, low cost, and high space utilisation. However, the low trajectory accuracy of robots will affect the manufacturing accuracy of optical components when the robots and magnetorheological finishing (MRF) are combined. In this study, aiming at the problem of the diversity of trajectory error sources of robot-MRF, a continuous high-precision spatial dynamic trajectory error measurement system was established to measure the trajectory error accurately, and a step-by-step and multistage iterations trajectory error compensation method based on spatial similarity was established to obtain a high-precision trajectory. The experimental results show that compared with the common model calibration method and general non-model calibration method, this trajectory error compensation method can achieve accurate compensation of the trajectory error of the robot-MRF, and the trajectory accuracy of the Z-axis is improved from PV 0.2 mm to PV 0.1 mm. Furthermore, the finishing accuracy of the plane mirror from 0.066 to 0.016 RMS and the finishing accuracy of the spherical mirror from 0.184 RMS to 0.013 RMS using the compensated robot-MRF prove that the robot-MRF has the ability of high-precision polishing. This promotes the application of industrial robots in the field of optical manufacturing and lays the foundation for intelligent optical manufacturing. 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement.
DOI	10.1364/OE.474959
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收录类别	ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66729
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	R. Cheng,L. Li,X. Li,et al. High-precision magnetorheological finishing based on robot by measuring and compensating trajectory error[J]. Optics Express,2022,30(25):44741-44768.
APA	R. Cheng,L. Li,X. Li,B. Yang,X. Luo,&D. Xue and X. Zhang.(2022).High-precision magnetorheological finishing based on robot by measuring and compensating trajectory error.Optics Express,30(25),44741-44768.
MLA	R. Cheng,et al."High-precision magnetorheological finishing based on robot by measuring and compensating trajectory error".Optics Express 30.25(2022):44741-44768.

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