Changchun Institute of Optics,Fine Mechanics and Physics,CAS
| High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving | |
| Y. F. Yin; Z. W. Liu; S. Jiang; W. Wang; H. Z. Yu; G. Jiri; Q. Hao and W. H. Li | |
| 2022 | |
| 发表期刊 | Optics and Lasers in Engineering
 |
| ISSN | 0143-8166 |
| 卷号 | 158页码:7 |
| 摘要 | We propose a high-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving. The system is based on Doppler-steering interferometry of 2D gratings, heterodyne interferometry, and double-spatial element-staggered configuration. We obtain long-stroke and high-precision real-time 2D displacement information using the optical phase change and interference signal decoupling caused by the 2D grating. The system is tested experimentally and compared with a laser interferometer, and found to have a measurement resolution within 3 nm. The error within a measurement of 40 mm is better than +/- 175 nm and +/- 150 nm in the 2D grating directions. The design is then optimized and tested, and the resulting error within the 40-mm range is better than + 50 nm and -40 nm in the X-direction and + 100 nm and -80 nm in the Y -direction. The results show that the proposed configuration improves the accuracy of the measurement system, is suitable for engineering testing, and has the potential for further improvement. |
| DOI | 10.1016/j.optlaseng.2022.107167 |
| URL | 查看原文 |
| 收录类别 | sci ; ei |
| 语种 | 英语 |
| 引用统计 | |
| 文献类型 | 期刊论文 |
| 条目标识符 | http://ir.ciomp.ac.cn/handle/181722/66724 |
| 专题 | 中国科学院长春光学精密机械与物理研究所 |
| 推荐引用方式 GB/T 7714 | Y. F. Yin,Z. W. Liu,S. Jiang,et al. High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving[J]. Optics and Lasers in Engineering,2022,158:7. |
| APA | Y. F. Yin.,Z. W. Liu.,S. Jiang.,W. Wang.,H. Z. Yu.,...&Q. Hao and W. H. Li.(2022).High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving.Optics and Lasers in Engineering,158,7. |
| MLA | Y. F. Yin,et al."High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving".Optics and Lasers in Engineering 158(2022):7. |
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| High-precision 2D gr（2254KB） | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 | |
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