Emerging low-dimensional materials for nanoelectromechanical systems resonators

doi:10.1080/21663831.2022.2111233

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	Emerging low-dimensional materials for nanoelectromechanical systems resonators
	S. Y. Ban; X. C. Nie; Z. H. Lei; J. B. Yi; A. Y. Vinu; Y. Bao and Y. P. Liu
	2023
Source Publication	Materials Research Letters
ISSN	2166-3831
Volume	11 Issue:1 Pages:21-52
Abstract	IMPACT STATEMENT This review delineates the principles and advances of nanoelectromechanical system resonators based on low-dimensional materials, followed by promising applications, such as sensings, nano-electronics and quantum detections. Low-dimensional materials (LDMs), due to exotic mechanical, optical and electrical properties enhanced by ultrahigh surface-to-volume ratio and quantum confinements, have taken centerstage in nanoelectromechanical system (NEMS) resonators. The ability to survive from high strains and complex environments enables LDMs-based NEMS resonators innovative effectuations for mass-, gas- and bio-sensings and computings. In this review, we highlighted the fabrication, actuation, detection, figure of merit, influence factors and recent process of LDMs-based NEMS resonators. After overviewing representative applications and feasible directions, we summarized the confronted challenges in fabrications, tunings and utilizations of LDMs-based NEMS resonators. Finally, the prospects that may properly tackle these obstacles were concluded, attempting to offer useful guidelines for both theoretical and experimental experts to promote NEMS resonators one step closer toward industrializations.
DOI	10.1080/21663831.2022.2111233
URL	查看原文
Indexed By	sci
Language	英语
Citation statistics
Document Type	期刊论文
Identifier	http://ir.ciomp.ac.cn/handle/181722/66616
Collection	中国科学院长春光学精密机械与物理研究所
Recommended Citation GB/T 7714	S. Y. Ban,X. C. Nie,Z. H. Lei,et al. Emerging low-dimensional materials for nanoelectromechanical systems resonators[J]. Materials Research Letters,2023,11(1):21-52.
APA	S. Y. Ban,X. C. Nie,Z. H. Lei,J. B. Yi,A. Y. Vinu,&Y. Bao and Y. P. Liu.(2023).Emerging low-dimensional materials for nanoelectromechanical systems resonators.Materials Research Letters,11(1),21-52.
MLA	S. Y. Ban,et al."Emerging low-dimensional materials for nanoelectromechanical systems resonators".Materials Research Letters 11.1(2023):21-52.

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中国科学院长春光学精密机械与物理研究所