The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

doi:10.3390/app12136503

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	The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications
	Y. Wang; X. H. Fu; Y. Y. Chen; L. Qin; Y. Q. Ning and L. J. Wang
	2022
发表期刊	Applied Sciences-Basel
卷号	12 期号:13 页码:31
摘要	The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting.
DOI	10.3390/app12136503
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收录类别	sci
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66558
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Wang,X. H. Fu,Y. Y. Chen,et al. The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications[J]. Applied Sciences-Basel,2022,12(13):31.
APA	Y. Wang,X. H. Fu,Y. Y. Chen,L. Qin,&Y. Q. Ning and L. J. Wang.(2022).The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications.Applied Sciences-Basel,12(13),31.
MLA	Y. Wang,et al."The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications".Applied Sciences-Basel 12.13(2022):31.

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