Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

doi:10.1088/1674-1056/ac4a64

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	Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space
	S. Q. Kuang; B. C. Li; Y. Wang; X. P. Gong and J. Q. Li
	2022
发表期刊	Chinese Physics B
ISSN	1674-1056
卷号	31 期号:7 页码:7
摘要	With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multi-objective genetic algorithms is theoretically proposed. Owing to the multi-objective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction. Compared with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.
DOI	10.1088/1674-1056/ac4a64
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收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66549
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	S. Q. Kuang,B. C. Li,Y. Wang,et al. Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space[J]. Chinese Physics B,2022,31(7):7.
APA	S. Q. Kuang,B. C. Li,Y. Wang,&X. P. Gong and J. Q. Li.(2022).Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space.Chinese Physics B,31(7),7.
MLA	S. Q. Kuang,et al."Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space".Chinese Physics B 31.7(2022):7.

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