Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings

doi:10.3390/mi13040632

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	Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings
	Y. Wang; X. Fu; Y. Chen; Y. Lei; L. Qin and L. Wang
	2022
发表期刊	Micromachines
ISSN	2072666X
卷号	13 期号:4
摘要	Traditional reflective diffraction gratings working at 4.7 m are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 m period multilayer grating design using hybrid multilayer dielectrics. With a layer of 0.353 m Si and a layer of 0.905 m SiO2 forming the rectangular grating, the maximum of larger than 99.99% and the overall first-order DE reached 97.88%. The usable spectrum width is larger than 0.2 m, more than four times larger than that of the pure Si rectangular grating. This high DE multilayer grating is an ideal element for high-power laser systems with the spectrum beam combining method. 2022 by the authors. Licensee MDPI, Basel, Switzerland.
DOI	10.3390/mi13040632
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收录类别	sci ; ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66530
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Wang,X. Fu,Y. Chen,et al. Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings[J]. Micromachines,2022,13(4).
APA	Y. Wang,X. Fu,Y. Chen,Y. Lei,&L. Qin and L. Wang.(2022).Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings.Micromachines,13(4).
MLA	Y. Wang,et al."Design of 4.7 m High-Efficiency Hybrid Dielectric Reflection Gratings".Micromachines 13.4(2022).

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