Deep investigation of two-dimensional structure arrays formed on Si surface

doi:10.1016/j.apsusc.2022.154615

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	Deep investigation of two-dimensional structure arrays formed on Si surface
	R. Y. Li; X. Y. Li; T. T. Zou; W. F. Fu; J. Xing; T. Huang; Z. Yu and J. J. Yang
	2022
发表期刊	Applied Surface Science
ISSN	0169-4332
卷号	605 页码:8
摘要	Femtosecond laser-induced micro and nanostructures have been widely explored, because of their exhibiting great potential applications in many areas. However, the flexible control of the surface structure in both morphology and arrangement regularity still needs further investigation. This paper presents a maskless method to fabricate the two-dimensional periodic arrays of nanostructures on silicon surface based on the surface wave self-regulatory effect upon irradiation of the circularly polarized femtosecond laser. The spatial period of the regular structure arrays exhibit the alterable and constant values in the directions parallel and perpendicular to the sample scanning, respectively, the latter of which is highly dependent on the laser scanning speed. The formation mechanisms of the periodic structure arrays are explored through simulations with both the finitedifference time-domain method and the dynamic interference positive feedback model. The dynamic modulation of the laser energy on Si surface is revealed to originate from the self-regulatory effect during the laser processing. In addition, the depth of the two-dimensional structure arrays can be further experimentally adjusted from 74.5 nm to 112 nm by HF etching process.
DOI	10.1016/j.apsusc.2022.154615
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收录类别	sci ; ei
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66506
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	R. Y. Li,X. Y. Li,T. T. Zou,et al. Deep investigation of two-dimensional structure arrays formed on Si surface[J]. Applied Surface Science,2022,605:8.
APA	R. Y. Li.,X. Y. Li.,T. T. Zou.,W. F. Fu.,J. Xing.,...&Z. Yu and J. J. Yang.(2022).Deep investigation of two-dimensional structure arrays formed on Si surface.Applied Surface Science,605,8.
MLA	R. Y. Li,et al."Deep investigation of two-dimensional structure arrays formed on Si surface".Applied Surface Science 605(2022):8.

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