Cold Laser Micro-Machining of PDMS as an Encapsulation Layer for Soft Implantable Neural Interface

doi:10.3390/mi13091484

CIOMP OpenIR

	Cold Laser Micro-Machining of PDMS as an Encapsulation Layer for Soft Implantable Neural Interface
	M. J. Wang; Y. Zhang; J. X. Bin; L. Niu; J. Zhang; L. S. Liu; A. P. Wang; J. Tao; J. Q. Liang; L. H. Zhang and X. Y. Kang
	2022
发表期刊	Micromachines
卷号	13 期号:9 页码:13
摘要	PDMS (polydimethylsiloxane) is an important soft biocompatible material, which has various applications such as an implantable neural interface, a microfluidic chip, a wearable brain-computer interface, etc. However, the selective removal of the PDMS encapsulation layer is still a big challenge due to its chemical inertness and soft mechanical properties. Here, we use an excimer laser as a cold micro-machining tool for the precise removal of the PDMS encapsulation layer which can expose the electrode sites in an implantable neural interface. This study investigated and optimized the effect of excimer laser cutting parameters on the electrochemical impedance of a neural electrode by using orthogonal experiment design. Electrochemical impedance at the representative frequencies is discussed, which helps to construct the equivalent circuit model. Furthermore, the parameters of the equivalent circuit model are fitted, which reveals details about the electrochemical property of neural electrode using PDMS as an encapsulation layer. Our experimental findings suggest the promising application of excimer lasers in the micro-machining of implantable neural interface.
DOI	10.3390/mi13091484
URL	查看原文
收录类别	sci ; ei
语种	英语
引用统计	被引频次：2[WOS] [WOS记录] [WOS相关记录]
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66470
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. J. Wang,Y. Zhang,J. X. Bin,et al. Cold Laser Micro-Machining of PDMS as an Encapsulation Layer for Soft Implantable Neural Interface[J]. Micromachines,2022,13(9):13.
APA	M. J. Wang.,Y. Zhang.,J. X. Bin.,L. Niu.,J. Zhang.,...&L. H. Zhang and X. Y. Kang.(2022).Cold Laser Micro-Machining of PDMS as an Encapsulation Layer for Soft Implantable Neural Interface.Micromachines,13(9),13.
MLA	M. J. Wang,et al."Cold Laser Micro-Machining of PDMS as an Encapsulation Layer for Soft Implantable Neural Interface".Micromachines 13.9(2022):13.

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