Analysis of a Capacitive Sensing Circuit and Sensitive Structure Based on a Low-Temperature-Drift Planar Transformer

doi:10.3390/s22239284

CIOMP OpenIR

	Analysis of a Capacitive Sensing Circuit and Sensitive Structure Based on a Low-Temperature-Drift Planar Transformer
	Y. Sui; T. Yu; L. Wang; Z. Wang; K. Xue; Y. Chen; X. Liu and Y. Chen
	2022
发表期刊	Sensors
ISSN	14248220
卷号	22 期号:23
摘要	In space gravitational-wave-detection missions, inertial sensors are used as the core loads, and their acceleration noise needs to reach (Formula presented.) at a frequency of (Formula presented.), which corresponds to the capacitive sensing system; the capacitive sensing noise on the sensitive axis needs to reach (Formula presented.). Unlike traditional circuit noise evaluation, the noise in the (Formula presented.) frequency band is dominated by the thermal noise and the (Formula presented.) noise of the device, which is a challenging technical goal. In this paper, a low-frequency, high-precision resonant capacitor bridge method based on a planar transformer is used. Compared with the traditional winding transformer, the developed planar transformer has the advantages of low temperature drift and low (Formula presented.) noise. For closed-loop measurements of capacitive sensing circuits and sensitive structures, the minimum capacitive resolution in the time domain is about (Formula presented.), which is far lower than the scientific measurement resolution requirement of (Formula presented.) for gravitational wave detection. The capacitive sensing noise is converted to (Formula presented.) in the frequency band of (Formula presented.). Although there is a gap between the closed-loop measurement results and the final index, the measurement environment is an experimental condition without temperature control on the ground; additionally, in China, the measurement integrity and actual measurement results of the capacitive sensing function have reached a domestic leading level. This is the realization of Chinas future space gravitational wave exploration. 2022 by the authors.
DOI	10.3390/s22239284
URL	查看原文
收录类别	ei
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/66412
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Sui,T. Yu,L. Wang,et al. Analysis of a Capacitive Sensing Circuit and Sensitive Structure Based on a Low-Temperature-Drift Planar Transformer[J]. Sensors,2022,22(23).
APA	Y. Sui.,T. Yu.,L. Wang.,Z. Wang.,K. Xue.,...&X. Liu and Y. Chen.(2022).Analysis of a Capacitive Sensing Circuit and Sensitive Structure Based on a Low-Temperature-Drift Planar Transformer.Sensors,22(23).
MLA	Y. Sui,et al."Analysis of a Capacitive Sensing Circuit and Sensitive Structure Based on a Low-Temperature-Drift Planar Transformer".Sensors 22.23(2022).

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Analysis of a Capaci（10467KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载