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碳纳米管场发射电子源的研究
Alternative TitleStudy of carbon nanotube field emission electron sources
吕文辉
Subtype博士
Thesis Advisor宋航
2008-05-26
Degree Grantor中国科学院长春光学精密机械与物理所
Place of Conferral长春光学精密机械与物理所
Degree Discipline凝聚态物理
Keyword场发射电子源 碳纳米管 电泳淀积 结构设计 场增强效应
Abstract碳纳米管具有较大的长径比,极高的电导率,卓越的机械强度和化学稳定性等优点,被认为是理想的场发射材料。通过多年的努力,人们已经获得了多种以碳纳米管为场发射电子源的原理型真空微电子器件,如:场发射平板显示器、X射线管、新型场发射光源、微波管等。这些器件研究和开发的一个关键是获得高效碳纳米管场发射电子源。目前,碳纳米管场发射电子源的制备技术及其场发射性能的改善和提高已成为国际真空微电子领域中的研究热点。本论文就电泳制备碳纳米管场发射电子源及改善它的场发射性能进行了详细的研究。 获得了碳纳米管和衬底电极间的接触电阻存在时碳纳米管的场发射规律。计算了接触电阻对碳纳米管场发射特性的影响,计算结果表明并得出接触电阻的存在是导致高场下出现发射电流饱和的原因之一。 研究了电泳淀积碳纳米管场发射电子源的制备工艺,获得了分散均匀、体系稳定的碳纳米管电泳液;系统的研究了制备碳纳米管场发射电子源的电泳技术。研究了碳纳米管场发射电子源的电场激活技术;并分析和研究了吸附氮气对碳纳米管场发射性能的影响;发现电场激活可有效使碳纳米管吸附的氮气有效的脱附,从而有效改善碳纳米管的场发射性能。 基于二次场增强效应,设计并制备了多种结构的碳纳米管场发射电子源,包括条状电极、金属微米颗粒过渡层电极、规则银台阵列电极的碳纳米管场发射电子源。研究表明将碳纳米管组装到图形化的电极上能够改善其场发射性能,提供了一个优化碳纳米管场发射电子源的一个途径。 发展了一种制备带栅极结构的碳纳米管场发射电子源中选域淀积碳纳米管的方法;设计了一种平面栅极型碳纳米管场发射面电子源的结构,理论证实该结构切实可行;最后采用发展的碳纳米管选域淀积的方法制备了平面栅极型碳纳米管场发射面电子源,并研究了它的场发射特性。; Carbon nanotube(CNT)is considered to be an ideal cold cathode material because of its high geometric aspect ratio, high electrical conductivity, high mechanical strength, and chemical inertness. Many prototype vacuum microelectronic devices using CNTs as field emission electron sources have been fabricated, such as field emission display (FED), X-ray tubes, field emission lamp and so on. However, how to fabricate high efficiency CNT field emission electron sources and how to improve its field emission properties are still important things for the application of CNT field emission electron sources. In this thesis, the technique of electrophoretic deposition and improvement the field emission properties of CNT field emission electron sources have been studied systemically. At first, the field emission properties of CNT are analyzed theoretically when the contact resistance between CNT and the substrate take into account. It is found that the contact resistance is one of the reasons to result the saturation of field emission current at high electric field region. Then, the technique of electrophoretic deposition CNT field emission electron sources has been studied experimentally. It is successfully to get fully scattered carbon nanotube colloid for the electrophoretic deposition and to deposit carbon nanotube on the substrate. The influences of the electric field activation and the adsorption of nitrogen on field emission of CNTs are investigated. The results indicate that the electric field activation enhances the field emission propertis because of the nitrogen molecules will be disassociated in the higher activation electric field. After then, three kinds of different pattened CNT field emission electron sources are designed based on the two-grade field enhancement effect. These electron sources are fabricated by electrophoretic deposit CNTs onto different pattened electrodes, i.e. strip indium tin oxide (ITO) electrode, silver micro-particle layer electrode and silver estrade array electrode. It is found that the field emission properties of pattened electron sources are better than the simple planar electron sources. This result may be show an efficient way to get high quality CNT field emission electron sources. Finally, we develop a simple methode of electrophoretic depositing CNTs selectively for the field emission electron sources with gate structure. And we also have designed and fabricated successfully the CNT electron sources panel with planar gate stripe. The field emission properties of the electron sources panel are studied theoretically and experimentally.
Pages93
Language中文
Document Type学位论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/661
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
吕文辉. 碳纳米管场发射电子源的研究[D]. 长春光学精密机械与物理所. 中国科学院长春光学精密机械与物理所,2008.
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