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Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix
W. Meng; F. Xu; Z. Yu; T. Tao; L. Shao; L. Liu; T. Li; K. Wen; J. Wang; L. He; L. Sun; W. Li; H. Ning; N. Dai; F. Qin; X. Tu; D. Pan; S. He; D. Li; Y. Zheng; Y. Lu; B. Liu; R. Zhang; Y. Shi and X. Wang
2021
Source PublicationNature Nanotechnology
ISSN17483387
Volume16Issue:11Pages:1231-1236
AbstractTwo-dimensional materials are promising candidates for future electronics due to unmatched device performance at atomic limit and low-temperature heterogeneous integration. To adopt these emerging materials in computing and optoelectronic systems, back end of line (BEOL) integration with mainstream technologies is needed. Here, we show the integration of large-area MoS2 thin-film transistors (TFTs) with nitride micro light-emitting diodes (LEDs) through a BEOL process and demonstrate high-resolution displays. The MoS2 transistors exhibit median mobility of 54 cm2 V1s 1, 210 A m1 drive current and excellent uniformity. The TFTs can drive micrometre-sized LEDs to 7.1 107 cd m2 luminance under low voltage. Comprehensive analysis on driving capability, response time, power consumption and modulation scheme indicates that MoS2 TFTs are suitable for a range of display applications up to the high resolution and brightness limit. We further demonstrate prototypical 32 32 active-matrix displays at 1,270 pixels-per-inch resolution. Moreover, our process is fully monolithic, low-temperature, scalable and compatible with microelectronic processing. 2021, The Author(s), under exclusive licence to Springer Nature Limited.
DOI10.1038/s41565-021-00966-5
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Indexed BySCI ; EI
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Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/65699
Collection中国科学院长春光学精密机械与物理研究所
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GB/T 7714
W. Meng,F. Xu,Z. Yu,et al. Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix[J]. Nature Nanotechnology,2021,16(11):1231-1236.
APA W. Meng.,F. Xu.,Z. Yu.,T. Tao.,L. Shao.,...&Y. Shi and X. Wang.(2021).Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix.Nature Nanotechnology,16(11),1231-1236.
MLA W. Meng,et al."Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix".Nature Nanotechnology 16.11(2021):1231-1236.
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