CIOMP OpenIR
Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix
W. Meng; F. Xu; Z. Yu; T. Tao; L. Shao; L. Liu; T. Li; K. Wen; J. Wang; L. He; L. Sun; W. Li; H. Ning; N. Dai; F. Qin; X. Tu; D. Pan; S. He; D. Li; Y. Zheng; Y. Lu; B. Liu; R. Zhang; Y. Shi and X. Wang
2021
发表期刊Nature Nanotechnology
ISSN17483387
卷号16期号:11页码:1231-1236
摘要Two-dimensional materials are promising candidates for future electronics due to unmatched device performance at atomic limit and low-temperature heterogeneous integration. To adopt these emerging materials in computing and optoelectronic systems, back end of line (BEOL) integration with mainstream technologies is needed. Here, we show the integration of large-area MoS2 thin-film transistors (TFTs) with nitride micro light-emitting diodes (LEDs) through a BEOL process and demonstrate high-resolution displays. The MoS2 transistors exhibit median mobility of 54 cm2 V1s 1, 210 A m1 drive current and excellent uniformity. The TFTs can drive micrometre-sized LEDs to 7.1 107 cd m2 luminance under low voltage. Comprehensive analysis on driving capability, response time, power consumption and modulation scheme indicates that MoS2 TFTs are suitable for a range of display applications up to the high resolution and brightness limit. We further demonstrate prototypical 32 32 active-matrix displays at 1,270 pixels-per-inch resolution. Moreover, our process is fully monolithic, low-temperature, scalable and compatible with microelectronic processing. 2021, The Author(s), under exclusive licence to Springer Nature Limited.
DOI10.1038/s41565-021-00966-5
URL查看原文
收录类别SCI ; EI
引用统计
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/65699
专题中国科学院长春光学精密机械与物理研究所
推荐引用方式
GB/T 7714
W. Meng,F. Xu,Z. Yu,et al. Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix[J]. Nature Nanotechnology,2021,16(11):1231-1236.
APA W. Meng.,F. Xu.,Z. Yu.,T. Tao.,L. Shao.,...&Y. Shi and X. Wang.(2021).Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix.Nature Nanotechnology,16(11),1231-1236.
MLA W. Meng,et al."Three-dimensional monolithic micro-LED display driven by atomically thin transistor matrix".Nature Nanotechnology 16.11(2021):1231-1236.
条目包含的文件 下载所有文件
文件名称/大小 文献类型 版本类型 开放类型 使用许可
Three-dimensional mo(2510KB)期刊论文出版稿开放获取CC BY-NC-SA浏览 下载
个性服务
推荐该条目
保存到收藏夹
查看访问统计
导出为Endnote文件
谷歌学术
谷歌学术中相似的文章
[W. Meng]的文章
[F. Xu]的文章
[Z. Yu]的文章
百度学术
百度学术中相似的文章
[W. Meng]的文章
[F. Xu]的文章
[Z. Yu]的文章
必应学术
必应学术中相似的文章
[W. Meng]的文章
[F. Xu]的文章
[Z. Yu]的文章
相关权益政策
暂无数据
收藏/分享
文件名: Three-dimensional monolithic micro-LED display.pdf
格式: Adobe PDF
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。