Testing large convex aspheres using a single wedge compensation and stitching method

doi:10.1016/j.optcom.2020.126484

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	Testing large convex aspheres using a single wedge compensation and stitching method
	Z. Cai; X. Wang; H. Hu; H. Zhang; F. Wang; D. Xue and X. Zhang
	2021
发表期刊	Optics Communications
ISSN	304018
卷号	480
摘要	Testing large convex aspheric mirrors has always been a challenging metrology problem in optics. In response to this problem, a modified method that utilizes single wedge compensation to measure large convex aspheric mirrors is proposed in this paper. The principles of this method and aberration theory are first analyzed. Two simulation examples are designed to verify the method's applicability, and the sensitivity of this configuration is also analyzed, which proves that the accuracy of the configuration can be better than 0.006 (3.8 nm) with careful alignment and calibration. These examples and this analysis show that this configuration is feasible and flexible. 2020 Elsevier B.V.
DOI	10.1016/j.optcom.2020.126484
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收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65687
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Z. Cai,X. Wang,H. Hu,et al. Testing large convex aspheres using a single wedge compensation and stitching method[J]. Optics Communications,2021,480.
APA	Z. Cai,X. Wang,H. Hu,H. Zhang,F. Wang,&D. Xue and X. Zhang.(2021).Testing large convex aspheres using a single wedge compensation and stitching method.Optics Communications,480.
MLA	Z. Cai,et al."Testing large convex aspheres using a single wedge compensation and stitching method".Optics Communications 480(2021).

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