Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation

doi:10.37188/OPE.20212901.0072

CIOMP OpenIR

	Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation
	Q.-Y. Meng; H.-Y. Wang; W. Wang; Z.-C. Qin and X.-D. Wang
	2021
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	29 期号:1 页码:72-83
摘要	The final performance of an optical system depends not only on its theoretical design, but more importantly, on various error-causing factors such as surface processing, alignment position, and system stability during its construction. To explore the influencing factors and the error sensitivity of a reflective optical system, a coaxial two-mirror system is considered as the research object. The optical path variation (OPV) caused by a misalignment error is proposed as the evaluation index of the error sensitivity of the optical system, and the mathematical expression of the OPV caused by the mirror position misalignment factor is deduced theoretically. By using a standard Ritchey-Chretien system and the ray tracing method, the OPV caused by various disturbances is calculated. Compared with the theoretical value, the relative error is approximately 1%, which proves the accuracy of the theoretical expression of the OPV. Based on the theoretical study of OPV, a desensitization design method for a coaxial reflective optical system with an OPV is proposed and established. Considering a coaxial two-mirror system with a focal length of 5 600 mm as an example, an optical system that meets the OPV and wavefront error index is designed after 15 rounds of iterative optimization. The accuracy of the OPV as the sensitivity evaluation standard and the effectiveness of the desensitization design method are verified by the relationship between the OPV and the wavefront error modification. 2021, Science Press. All right reserved.
DOI	10.37188/OPE.20212901.0072
URL	查看原文
收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65621
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Q.-Y. Meng,H.-Y. Wang,W. Wang,et al. Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2021,29(1):72-83.
APA	Q.-Y. Meng,H.-Y. Wang,W. Wang,&Z.-C. Qin and X.-D. Wang.(2021).Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,29(1),72-83.
MLA	Q.-Y. Meng,et al."Sensitivity theoretical analysis and desensitization design method for reflective optical system based on optical path variation".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 29.1(2021):72-83.

条目包含的文件		下载所有文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
Sensitivity theoreti（1691KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览下载