Pose-varied swing arm profilometer test for off-axis aspheric surfaces with strong asphericity

doi:10.1364/OL.435200

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	Pose-varied swing arm profilometer test for off-axis aspheric surfaces with strong asphericity
	L. Xiong; X. Luo; X. Zhang; E. Qi; H. Hu; Z. Liu and F. Zhang
	2021
发表期刊	Optics Letters
ISSN	1469592
卷号	46 期号:19 页码:4040-4043
摘要	The swing arm profilometer (SAP) has been widely used to test large aspheric optics by measuring the asphericity from its best-fitting sphere (BFS). To further improve the test accuracy, we propose a pose-varied test mode for the SAP with a shorter-range probe to measure off-axis aspheric surfaces with stronger asphericity. In contrast to the classical SAP mode in which the air-table is fixed in a stationary position during measurement, we adjust the pose of each scan arc to match the local BFS and the measurement range of the probe decreases to half that of the global asphericity. To verify the effectiveness, we conduct experiments on an offaxis asphere with a diameter of 3 and 2 m. Compared with a classical SAP mode, it achieved an improved performance of 50% higher repeatability and 32% higher accuracy. 2021 Optical Society of America.
DOI	10.1364/OL.435200
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65542
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L. Xiong,X. Luo,X. Zhang,et al. Pose-varied swing arm profilometer test for off-axis aspheric surfaces with strong asphericity[J]. Optics Letters,2021,46(19):4040-4043.
APA	L. Xiong,X. Luo,X. Zhang,E. Qi,H. Hu,&Z. Liu and F. Zhang.(2021).Pose-varied swing arm profilometer test for off-axis aspheric surfaces with strong asphericity.Optics Letters,46(19),4040-4043.
MLA	L. Xiong,et al."Pose-varied swing arm profilometer test for off-axis aspheric surfaces with strong asphericity".Optics Letters 46.19(2021):4040-4043.

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