Oxidation ruled transition from normal to anomalous periodic structures with femtosecond laser irradiation on Cr/Si films

doi:10.1364/OE.433035

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	Oxidation ruled transition from normal to anomalous periodic structures with femtosecond laser irradiation on Cr/Si films
	H. Xie; B. Zhao; Y. Lei; Z. Yu; J. Cheng and J. Yang
	2021
发表期刊	Optics Express
ISSN	10944087
卷号	29 期号:20 页码:31408-31417
摘要	Elucidation of the underlying physics for laser-induced periodic surface structures (LIPSSs) is of great importance for their controllable fabrication. We here demonstrate a periodic structure transition from normal to anomalous morphology, upon femtosecond laser irradiation on 50-nm thick Cr/Si films in an air pressure-tunable chamber. As the air pressure gradually decreases, the amount of surface oxide induced by preceding laser pulses is found to reduce, and eventually triggering the structure evolution from the anomalously oriented subwavelength to normally oriented deep-subwavelength LIPSSs. The intriguing structure transition is explained in terms of the competitive excitation between the transverse-electric scattered surface wave and transverse-magnetic hybrid plasmon wave, which is ruled by the thickness of the preformed oxide layer indeed. 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
DOI	10.1364/OE.433035
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65511
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	H. Xie,B. Zhao,Y. Lei,et al. Oxidation ruled transition from normal to anomalous periodic structures with femtosecond laser irradiation on Cr/Si films[J]. Optics Express,2021,29(20):31408-31417.
APA	H. Xie,B. Zhao,Y. Lei,Z. Yu,&J. Cheng and J. Yang.(2021).Oxidation ruled transition from normal to anomalous periodic structures with femtosecond laser irradiation on Cr/Si films.Optics Express,29(20),31408-31417.
MLA	H. Xie,et al."Oxidation ruled transition from normal to anomalous periodic structures with femtosecond laser irradiation on Cr/Si films".Optics Express 29.20(2021):31408-31417.

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