Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution

doi:10.37188/OPE.20212901.0045

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	Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution
	C. Sun; J. Yang; J.-W. Zhu; T.-T. Ma; S.-L. Feng; N. Song; X.-Q. Guo and H.-Z. Guo
	2021
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	29 期号:1 页码:45-53
摘要	In order to realize the echelle spectrometer system with ultra-wide wavelength range and high resolution, an optical path structure design was proposed, and the detection method of deep ultraviolet lights was studied and verified. Frist, the optical structure combined the advantages of quasi-littrow structure and C-T structure, so as to ensure the dispersing path has the characteristics of high diffraction efficiency and the stray light was well suppressed. In the limited range of optional materials, the multi-optimization method was employed to design the optical parameters. In order to correct the aberration and improve the spectral resolution, a correction structure composed of spherical and cylindrical lenses was added. Finally, a solution to the detection of deep ultraviolet lights was proposed, and the feasibility of the scheme was verified by finite element analysis. The final design results indicates that in the wavelength range of 160-1 000 nm, the imaging spot RMS value is better than 12.1 m, the spectral resolution of 257.61 nm is better than 0.009 nm. It can meet the dispersion demand of ultra-wide wavelength range and high resolution detection system. 2021, Science Press. All right reserved.
DOI	10.37188/OPE.20212901.0045
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收录类别	EI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65488
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	C. Sun,J. Yang,J.-W. Zhu,et al. Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2021,29(1):45-53.
APA	C. Sun.,J. Yang.,J.-W. Zhu.,T.-T. Ma.,S.-L. Feng.,...&X.-Q. Guo and H.-Z. Guo.(2021).Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,29(1),45-53.
MLA	C. Sun,et al."Optical design of echelle spectrometer with ultra-wide wavelength range and high resolution".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 29.1(2021):45-53.

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